JPS574163A - Manufacture of sos/mos transistor - Google Patents

Manufacture of sos/mos transistor

Info

Publication number
JPS574163A
JPS574163A JP7741380A JP7741380A JPS574163A JP S574163 A JPS574163 A JP S574163A JP 7741380 A JP7741380 A JP 7741380A JP 7741380 A JP7741380 A JP 7741380A JP S574163 A JPS574163 A JP S574163A
Authority
JP
Japan
Prior art keywords
film
transistor
substrate
taperlingly
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7741380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS643349B2 (enrdf_load_stackoverflow
Inventor
Masao Fukuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7741380A priority Critical patent/JPS574163A/ja
Publication of JPS574163A publication Critical patent/JPS574163A/ja
Publication of JPS643349B2 publication Critical patent/JPS643349B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
JP7741380A 1980-06-09 1980-06-09 Manufacture of sos/mos transistor Granted JPS574163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7741380A JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7741380A JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Publications (2)

Publication Number Publication Date
JPS574163A true JPS574163A (en) 1982-01-09
JPS643349B2 JPS643349B2 (enrdf_load_stackoverflow) 1989-01-20

Family

ID=13633239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7741380A Granted JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Country Status (1)

Country Link
JP (1) JPS574163A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006324688A (ja) * 1994-06-03 2006-11-30 At & T Corp 多層ウエハ用ゲッタ及びその作製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006324688A (ja) * 1994-06-03 2006-11-30 At & T Corp 多層ウエハ用ゲッタ及びその作製法

Also Published As

Publication number Publication date
JPS643349B2 (enrdf_load_stackoverflow) 1989-01-20

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