JPS6432635A - Manufacture of thin-film element substrate - Google Patents
Manufacture of thin-film element substrateInfo
- Publication number
- JPS6432635A JPS6432635A JP18260087A JP18260087A JPS6432635A JP S6432635 A JPS6432635 A JP S6432635A JP 18260087 A JP18260087 A JP 18260087A JP 18260087 A JP18260087 A JP 18260087A JP S6432635 A JPS6432635 A JP S6432635A
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- etching
- thin
- time
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18260087A JPS6432635A (en) | 1987-07-22 | 1987-07-22 | Manufacture of thin-film element substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18260087A JPS6432635A (en) | 1987-07-22 | 1987-07-22 | Manufacture of thin-film element substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6432635A true JPS6432635A (en) | 1989-02-02 |
Family
ID=16121121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18260087A Pending JPS6432635A (en) | 1987-07-22 | 1987-07-22 | Manufacture of thin-film element substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6432635A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5314912A (en) * | 1976-07-27 | 1978-02-10 | Kumagai Gumi Co Ltd | Water bottom foundation forming apparatus |
JPS5575236A (en) * | 1978-12-04 | 1980-06-06 | Nec Corp | Method of fabricating semiconductor device |
JPS57211781A (en) * | 1981-06-24 | 1982-12-25 | Matsushita Electric Ind Co Ltd | Patterning method of double stacking thin film |
-
1987
- 1987-07-22 JP JP18260087A patent/JPS6432635A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5314912A (en) * | 1976-07-27 | 1978-02-10 | Kumagai Gumi Co Ltd | Water bottom foundation forming apparatus |
JPS5575236A (en) * | 1978-12-04 | 1980-06-06 | Nec Corp | Method of fabricating semiconductor device |
JPS57211781A (en) * | 1981-06-24 | 1982-12-25 | Matsushita Electric Ind Co Ltd | Patterning method of double stacking thin film |
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