JPS6430831U - - Google Patents
Info
- Publication number
- JPS6430831U JPS6430831U JP12664487U JP12664487U JPS6430831U JP S6430831 U JPS6430831 U JP S6430831U JP 12664487 U JP12664487 U JP 12664487U JP 12664487 U JP12664487 U JP 12664487U JP S6430831 U JPS6430831 U JP S6430831U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- vacuum
- suction
- substrate
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 230000005496 eutectics Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000005275 alloying Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75302—Shape
- H01L2224/75303—Shape of the pressing surface
Description
第1図は本考案の一実施例を示す構成図、第2
図は従来例を示す構成図である。 1……基板、2……半導体素子、3……金―シ
リコン共晶部、4……搬送吸着治具、5……吸着
穴、6……ホルダー、7……基板加熱板、9……
真空装置、11……不活性ガス吐出装置、12…
…三方弁(切換弁)。
図は従来例を示す構成図である。 1……基板、2……半導体素子、3……金―シ
リコン共晶部、4……搬送吸着治具、5……吸着
穴、6……ホルダー、7……基板加熱板、9……
真空装置、11……不活性ガス吐出装置、12…
…三方弁(切換弁)。
Claims (1)
- 搬送吸着治具の凹陥部に半導体素子を受け入れ
、該凹陥部の吸着穴より該素子を真空吸着し、前
記半導体素子と基板との間に適度な熱と荷重を加
え、共晶合金化により半導体素子を基板に結合す
る半導体素子の製造装置において、前記吸着穴に
、真空吸引する真空装置と不活性ガスを吐出する
不活性ガス吐出装置とを切換弁を介して並列に接
続したことを特徴とする半導体素子の製造装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12664487U JPS6430831U (ja) | 1987-08-20 | 1987-08-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12664487U JPS6430831U (ja) | 1987-08-20 | 1987-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6430831U true JPS6430831U (ja) | 1989-02-27 |
Family
ID=31378351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12664487U Pending JPS6430831U (ja) | 1987-08-20 | 1987-08-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6430831U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7905071B2 (en) | 2000-10-10 | 2011-03-15 | Saint-Gobain Glass France | Use of a window glass comprising a profiled bead for installing it in an opening |
-
1987
- 1987-08-20 JP JP12664487U patent/JPS6430831U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7905071B2 (en) | 2000-10-10 | 2011-03-15 | Saint-Gobain Glass France | Use of a window glass comprising a profiled bead for installing it in an opening |
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