JPH0320438U - - Google Patents

Info

Publication number
JPH0320438U
JPH0320438U JP7993389U JP7993389U JPH0320438U JP H0320438 U JPH0320438 U JP H0320438U JP 7993389 U JP7993389 U JP 7993389U JP 7993389 U JP7993389 U JP 7993389U JP H0320438 U JPH0320438 U JP H0320438U
Authority
JP
Japan
Prior art keywords
suction
wafer
tweezers
release
contact parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7993389U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7993389U priority Critical patent/JPH0320438U/ja
Publication of JPH0320438U publication Critical patent/JPH0320438U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例の縦断面図、第２図
は本考案の他の実施例の縦断面図である。 主要部分の符号の説明、１……ピンセツト、２
……吸引口、３……経路、４……真空破壊用口、
７……ゴムパツド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 第１および第２の接触部によりウエハを挾持す
    るウエハ用ピンセツトであつて、前記第１および
    第２の接触部のうち少なくとも一方に設けられ、
    前記ウエハを吸引する吸引手段に接続された吸引
    口と、前記吸引手段と前記吸引口とを接続する吸
    引経路上に設けられ、前記ウエハの吸引を解除す
    る解除口とを有することを特徴とするウエハ用ピ
    ンセツト。
JP7993389U 1989-07-06 1989-07-06 Pending JPH0320438U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7993389U JPH0320438U (ja) 1989-07-06 1989-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7993389U JPH0320438U (ja) 1989-07-06 1989-07-06

Publications (1)

Publication Number Publication Date
JPH0320438U true JPH0320438U (ja) 1991-02-28

Family

ID=31624543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7993389U Pending JPH0320438U (ja) 1989-07-06 1989-07-06

Country Status (1)

Country Link
JP (1) JPH0320438U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001233451A (ja) * 2000-02-23 2001-08-28 Dainippon Printing Co Ltd 基板搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001233451A (ja) * 2000-02-23 2001-08-28 Dainippon Printing Co Ltd 基板搬送装置

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