JPH0312440U - - Google Patents
Info
- Publication number
- JPH0312440U JPH0312440U JP7285489U JP7285489U JPH0312440U JP H0312440 U JPH0312440 U JP H0312440U JP 7285489 U JP7285489 U JP 7285489U JP 7285489 U JP7285489 U JP 7285489U JP H0312440 U JPH0312440 U JP H0312440U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tray
- wafer tray
- setting
- suction hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000009434 installation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図ａは本考案の一実施例を示す平面図、第
１図ｂは同断面図、第２図ａは従来のウエハー用
トレーを示す平面図、第２図ｂは同断面図である
。 １……ウエハー用トレー本体、２……ウエハー
設置部、３……ピンセツト用溝、４……取手部、
５，６……吸引用孔、７……密閉用裏面カバー、
８……ウエハー。
１図ｂは同断面図、第２図ａは従来のウエハー用
トレーを示す平面図、第２図ｂは同断面図である
。 １……ウエハー用トレー本体、２……ウエハー
設置部、３……ピンセツト用溝、４……取手部、
５，６……吸引用孔、７……密閉用裏面カバー、
８……ウエハー。
Claims (1)
- ウエハーを定位置に設置するウエハー用トレー
において、ウエハーが設置されるウエハー用トレ
ー本体のウエハー設置部に、ウエハーを真空吸着
する吸引用孔を有することを特徴とするウエハー
用トレー。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285489U JPH0312440U (ja) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285489U JPH0312440U (ja) | 1989-06-21 | 1989-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312440U true JPH0312440U (ja) | 1991-02-07 |
Family
ID=31611161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7285489U Pending JPH0312440U (ja) | 1989-06-21 | 1989-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312440U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544428A (en) * | 1977-06-10 | 1979-01-13 | Sakabe Kk | Woven artificial lawn |
| JPS5596182U (ja) * | 1978-12-25 | 1980-07-03 |
-
1989
- 1989-06-21 JP JP7285489U patent/JPH0312440U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544428A (en) * | 1977-06-10 | 1979-01-13 | Sakabe Kk | Woven artificial lawn |
| JPS5753902B2 (ja) * | 1977-06-10 | 1982-11-15 | ||
| JPS5596182U (ja) * | 1978-12-25 | 1980-07-03 |