JPH0338357U - - Google Patents

Info

Publication number
JPH0338357U
JPH0338357U JP9784089U JP9784089U JPH0338357U JP H0338357 U JPH0338357 U JP H0338357U JP 9784089 U JP9784089 U JP 9784089U JP 9784089 U JP9784089 U JP 9784089U JP H0338357 U JPH0338357 U JP H0338357U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
placement area
utility
ventilation groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9784089U
Other languages
English (en)
Other versions
JPH0745564Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989097840U priority Critical patent/JPH0745564Y2/ja
Publication of JPH0338357U publication Critical patent/JPH0338357U/ja
Application granted granted Critical
Publication of JPH0745564Y2 publication Critical patent/JPH0745564Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａはウエハおよびこの考案の一実施例の
サセプタの断面図、第１図ｂはこの考案の一実施
例のサセプタの平面図、第２図は従来のサセプタ
を示す断面図である。 １……ウエハ、２……サセプタ、３……ウエハ
載置領域、４，５……通気溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハを載置するサセプタにおいて、ウエハ載
    置領域の内側から外側まで通気溝を延設したこと
    を特徴とするサセプタ。
JP1989097840U 1989-08-21 1989-08-21 サセプタ Expired - Lifetime JPH0745564Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989097840U JPH0745564Y2 (ja) 1989-08-21 1989-08-21 サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989097840U JPH0745564Y2 (ja) 1989-08-21 1989-08-21 サセプタ

Publications (2)

Publication Number Publication Date
JPH0338357U true JPH0338357U (ja) 1991-04-12
JPH0745564Y2 JPH0745564Y2 (ja) 1995-10-18

Family

ID=31646966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989097840U Expired - Lifetime JPH0745564Y2 (ja) 1989-08-21 1989-08-21 サセプタ

Country Status (1)

Country Link
JP (1) JPH0745564Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100583944B1 (ko) * 1999-11-12 2006-05-26 삼성전자주식회사 상압 화학 기상 증착 공정용 서셉터
JP2018182290A (ja) * 2017-04-18 2018-11-15 日新イオン機器株式会社 静電チャック

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269578A (en) * 1975-12-08 1977-06-09 Hitachi Ltd Wafer suscepter
JPS5972127A (ja) * 1982-10-18 1984-04-24 Toshiba Corp 気相成長用溝切り熱板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269578A (en) * 1975-12-08 1977-06-09 Hitachi Ltd Wafer suscepter
JPS5972127A (ja) * 1982-10-18 1984-04-24 Toshiba Corp 気相成長用溝切り熱板

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100583944B1 (ko) * 1999-11-12 2006-05-26 삼성전자주식회사 상압 화학 기상 증착 공정용 서셉터
JP2018182290A (ja) * 2017-04-18 2018-11-15 日新イオン機器株式会社 静電チャック

Also Published As

Publication number Publication date
JPH0745564Y2 (ja) 1995-10-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term