JPS643052B2 - - Google Patents

Info

Publication number
JPS643052B2
JPS643052B2 JP4958283A JP4958283A JPS643052B2 JP S643052 B2 JPS643052 B2 JP S643052B2 JP 4958283 A JP4958283 A JP 4958283A JP 4958283 A JP4958283 A JP 4958283A JP S643052 B2 JPS643052 B2 JP S643052B2
Authority
JP
Japan
Prior art keywords
shutter
semi
finished product
jig
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4958283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59175198A (ja
Inventor
Kiminari Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4958283A priority Critical patent/JPS59175198A/ja
Publication of JPS59175198A publication Critical patent/JPS59175198A/ja
Publication of JPS643052B2 publication Critical patent/JPS643052B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP4958283A 1983-03-24 1983-03-24 半導体装置の供給装置 Granted JPS59175198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4958283A JPS59175198A (ja) 1983-03-24 1983-03-24 半導体装置の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4958283A JPS59175198A (ja) 1983-03-24 1983-03-24 半導体装置の供給装置

Publications (2)

Publication Number Publication Date
JPS59175198A JPS59175198A (ja) 1984-10-03
JPS643052B2 true JPS643052B2 (enrdf_load_html_response) 1989-01-19

Family

ID=12835209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4958283A Granted JPS59175198A (ja) 1983-03-24 1983-03-24 半導体装置の供給装置

Country Status (1)

Country Link
JP (1) JPS59175198A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS59175198A (ja) 1984-10-03

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