JPS643051B2 - - Google Patents
Info
- Publication number
- JPS643051B2 JPS643051B2 JP7932479A JP7932479A JPS643051B2 JP S643051 B2 JPS643051 B2 JP S643051B2 JP 7932479 A JP7932479 A JP 7932479A JP 7932479 A JP7932479 A JP 7932479A JP S643051 B2 JPS643051 B2 JP S643051B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solution
- growth
- dummy wafer
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7932479A JPS562639A (en) | 1979-06-22 | 1979-06-22 | Liquid phase growth of multiple element semiconductor crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7932479A JPS562639A (en) | 1979-06-22 | 1979-06-22 | Liquid phase growth of multiple element semiconductor crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS562639A JPS562639A (en) | 1981-01-12 |
| JPS643051B2 true JPS643051B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Family
ID=13686693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7932479A Granted JPS562639A (en) | 1979-06-22 | 1979-06-22 | Liquid phase growth of multiple element semiconductor crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS562639A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2517774Y2 (ja) * | 1991-06-24 | 1996-11-20 | 株式会社フクハラ | ドレン排出装置 |
-
1979
- 1979-06-22 JP JP7932479A patent/JPS562639A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS562639A (en) | 1981-01-12 |
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