JPS643047B2 - - Google Patents
Info
- Publication number
- JPS643047B2 JPS643047B2 JP57087879A JP8787982A JPS643047B2 JP S643047 B2 JPS643047 B2 JP S643047B2 JP 57087879 A JP57087879 A JP 57087879A JP 8787982 A JP8787982 A JP 8787982A JP S643047 B2 JPS643047 B2 JP S643047B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- single crystal
- polycrystalline
- semiconductor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P95/00—
-
- H10P14/2905—
-
- H10P14/3238—
-
- H10P14/3411—
-
- H10P14/3458—
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- H10P14/3808—
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- H10P14/382—
Landscapes
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087879A JPS5825222A (ja) | 1982-05-26 | 1982-05-26 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087879A JPS5825222A (ja) | 1982-05-26 | 1982-05-26 | 半導体装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14327079A Division JPS5667923A (en) | 1979-11-07 | 1979-11-07 | Preparation method of semiconductor system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5825222A JPS5825222A (ja) | 1983-02-15 |
| JPS643047B2 true JPS643047B2 (member.php) | 1989-01-19 |
Family
ID=13927146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57087879A Granted JPS5825222A (ja) | 1982-05-26 | 1982-05-26 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5825222A (member.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6336515A (ja) * | 1986-07-30 | 1988-02-17 | Sony Corp | 半導体単結晶薄膜の製造方法 |
| JPS6445975A (en) * | 1987-08-12 | 1989-02-20 | Nippon Kokan Kk | Cavitation detecting device for pump |
-
1982
- 1982-05-26 JP JP57087879A patent/JPS5825222A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5825222A (ja) | 1983-02-15 |
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