JPS6428813A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6428813A
JPS6428813A JP18398887A JP18398887A JPS6428813A JP S6428813 A JPS6428813 A JP S6428813A JP 18398887 A JP18398887 A JP 18398887A JP 18398887 A JP18398887 A JP 18398887A JP S6428813 A JPS6428813 A JP S6428813A
Authority
JP
Japan
Prior art keywords
region
epitaxial layer
light
laser beam
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18398887A
Other languages
English (en)
Inventor
Junichi Hoshina
Yuzaburo Ban
Mototsugu Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18398887A priority Critical patent/JPS6428813A/ja
Publication of JPS6428813A publication Critical patent/JPS6428813A/ja
Pending legal-status Critical Current

Links

JP18398887A 1987-07-23 1987-07-23 Manufacture of semiconductor device Pending JPS6428813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18398887A JPS6428813A (en) 1987-07-23 1987-07-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18398887A JPS6428813A (en) 1987-07-23 1987-07-23 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6428813A true JPS6428813A (en) 1989-01-31

Family

ID=16145350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18398887A Pending JPS6428813A (en) 1987-07-23 1987-07-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6428813A (ja)

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