JPS6427847U - - Google Patents

Info

Publication number
JPS6427847U
JPS6427847U JP1987121264U JP12126487U JPS6427847U JP S6427847 U JPS6427847 U JP S6427847U JP 1987121264 U JP1987121264 U JP 1987121264U JP 12126487 U JP12126487 U JP 12126487U JP S6427847 U JPS6427847 U JP S6427847U
Authority
JP
Japan
Prior art keywords
microwave
ultraviolet
ultraviolet light
cavity
emitting lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987121264U
Other languages
English (en)
Other versions
JPH0621167Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121264U priority Critical patent/JPH0621167Y2/ja
Priority to US07/228,043 priority patent/US4928040A/en
Publication of JPS6427847U publication Critical patent/JPS6427847U/ja
Application granted granted Critical
Publication of JPH0621167Y2 publication Critical patent/JPH0621167Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案にかかる装置の一具体例の断面
図を示し、第２図は本考案に用られる紫外線反射
板の一具体例の断面図を示し、第３図は公知の装
置の部分断面図を示す。 １…マイクロ波発振管、２…導波管、３…マイ
クロ波空洞、４…紫外線発光ランプ、５…マイク
ロ波発生アンテナ、６…マイクロ波、７…頂面、
８…スロツト、９…紫外線、１１…網状部材、１
００…紫外線反射板、１０２…光透過性基板、１
０３…干渉膜。

Claims (1)

    【実用新案登録請求の範囲】
  1. マイクロ波発振管と、このマイクロ波発振管に
    連結されたマイクロ波空胴と、このマイクロ波空
    胴内に配置された紫外線発光ランプとを備え、マ
    イクロ波発振管から発振されたマイクロ波がマイ
    クロ波空胴頂面のスロツトを通してマイクロ波空
    胴内に送達され、このマイクロ波の照射を受けて
    マイクロ波空胴内の紫外線発光ランプが励起され
    、紫外線を発生する装置において、前記マイクロ
    波空胴内の紫外線発光ランプの近傍には紫外線反
    射板が取りはずし自在に取りつけられ、この反射
    板は光透過性基板上に酸化ジルコニウムの第一層
    を蒸着し、さらにその上に酸化シリコンの第二層
    を蒸着し、これを繰り返して厚さ２乃至２．２ミ
    クロンの干渉膜を形成してなるマイクロ波励起に
    よる紫外線発生装置。
JP1987121264U 1987-08-07 1987-08-07 マイクロ波励起による紫外線発生装置 Expired - Lifetime JPH0621167Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987121264U JPH0621167Y2 (ja) 1987-08-07 1987-08-07 マイクロ波励起による紫外線発生装置
US07/228,043 US4928040A (en) 1987-08-07 1988-08-04 Ultra violet ray generator by means of microwave excitation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121264U JPH0621167Y2 (ja) 1987-08-07 1987-08-07 マイクロ波励起による紫外線発生装置

Publications (2)

Publication Number Publication Date
JPS6427847U true JPS6427847U (ja) 1989-02-17
JPH0621167Y2 JPH0621167Y2 (ja) 1994-06-01

Family

ID=14806948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121264U Expired - Lifetime JPH0621167Y2 (ja) 1987-08-07 1987-08-07 マイクロ波励起による紫外線発生装置

Country Status (2)

Country Link
US (1) US4928040A (ja)
JP (1) JPH0621167Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593509U (ja) * 1992-05-18 1993-12-21 三輪精機株式会社 フィルタ装置
JP2002260595A (ja) * 2000-10-31 2002-09-13 Nordson Corp 紫外線ランプシステムおよび方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0637521Y2 (ja) * 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
US5039918A (en) * 1990-04-06 1991-08-13 New Japan Radio Co., Ltd. Electrodeless microwave-generated radiation apparatus
DE4141717A1 (de) * 1991-12-18 1993-07-01 Bayerische Motoren Werke Ag Scheinwerfer fuer kraftfahrzeuge
US5334913A (en) * 1993-01-13 1994-08-02 Fusion Systems Corporation Microwave powered lamp having a non-conductive reflector within the microwave cavity
US5525865A (en) * 1994-02-25 1996-06-11 Fusion Lighting, Inc. Compact microwave source for exciting electrodeless lamps
US6265830B1 (en) 1999-03-19 2001-07-24 Nordson Corporation Apparatus and method for supplying a regulated current to a magnetron filament
AU4449700A (en) 1999-05-12 2000-12-05 Fusion Lighting, Inc. High brightness microwave lamp
AU7489500A (en) 1999-09-20 2001-04-24 Nordson Corporation Apparatus and method for generating ultraviolet radiation
US6323601B1 (en) 2000-09-11 2001-11-27 Nordson Corporation Reflector for an ultraviolet lamp system
CA2533580A1 (en) * 2003-07-24 2005-02-10 Eisenmann Maschinenbau Gmbh & Co. Kg Device for hardening a coating of an object, which is made of a material hardening under electromagnetic radiation, especially a uv lacquer or a thermally hardening lacquer
DE10346131A1 (de) * 2003-10-01 2005-05-12 Heraeus Noblelight Gmbh UV-Lampenanordnung und deren Verwendung
CN201017853Y (zh) * 2007-03-16 2008-02-06 金行星 同轴无极灯
TWI785519B (zh) * 2021-03-05 2022-12-01 台灣積體電路製造股份有限公司 微波產生器、紫外光源、與基板處理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325084A (en) * 1976-08-06 1978-03-08 Perkin Elmer Corp Gas discharge lamp
JPS6229097A (ja) * 1985-07-31 1987-02-07 アールディエス株式会社 マイクロ波放電光源装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001632A (en) * 1975-04-21 1977-01-04 Gte Laboratories Incorporated High frequency excited electrodeless light source
US4223250A (en) * 1978-12-22 1980-09-16 Gte Laboratories Incorporated Protective coatings for light sources

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325084A (en) * 1976-08-06 1978-03-08 Perkin Elmer Corp Gas discharge lamp
JPS6229097A (ja) * 1985-07-31 1987-02-07 アールディエス株式会社 マイクロ波放電光源装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593509U (ja) * 1992-05-18 1993-12-21 三輪精機株式会社 フィルタ装置
JP2002260595A (ja) * 2000-10-31 2002-09-13 Nordson Corp 紫外線ランプシステムおよび方法

Also Published As

Publication number Publication date
US4928040A (en) 1990-05-22
JPH0621167Y2 (ja) 1994-06-01

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