JPS6427255A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6427255A JPS6427255A JP62183894A JP18389487A JPS6427255A JP S6427255 A JPS6427255 A JP S6427255A JP 62183894 A JP62183894 A JP 62183894A JP 18389487 A JP18389487 A JP 18389487A JP S6427255 A JPS6427255 A JP S6427255A
- Authority
- JP
- Japan
- Prior art keywords
- region
- transistor
- emitter
- inverter transistor
- cmos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 230000003190 augmentative effect Effects 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0623—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Bipolar Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
PURPOSE:To increase the working speed of an I<2>L for a bipolar CMOS integrated circuit by simultaneously forming one conductivity type first region as one part of an emitter in an inverter transistor for the I<2>L and one conductivity type second region as a well in a MOS transistor. CONSTITUTION:An N<+> type well region 7a as one part of an emitter region in an inverter transistor for an I<2>L and an N<+> type well region 7b in a P channel transistor for a CMOS are shaped simultaneously, thus improving the performance of both the I<2>L and the CMOS. That is, emitter concentration just under a base region 8 is increased, the injection efficiency of the inverter transistor can be enhanced and the storage of hole charges in an epitaxial layer can be reduced by forming the N<+> type well region 7a in concentration higher than the epitaxial layer 4 in an I<2>L section. Accordingly, the fT of the inverter transistor is augmented, and tpdmin can be made small, and the working speed of the I<2>L can be increased.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62183894A JPS6427255A (en) | 1987-07-22 | 1987-07-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62183894A JPS6427255A (en) | 1987-07-22 | 1987-07-22 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6427255A true JPS6427255A (en) | 1989-01-30 |
Family
ID=16143675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62183894A Pending JPS6427255A (en) | 1987-07-22 | 1987-07-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6427255A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5203143A (en) * | 1992-03-28 | 1993-04-20 | Tempo G | Multiple and split pressure sensitive adhesive stratums for carrier tape packaging system |
-
1987
- 1987-07-22 JP JP62183894A patent/JPS6427255A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5203143A (en) * | 1992-03-28 | 1993-04-20 | Tempo G | Multiple and split pressure sensitive adhesive stratums for carrier tape packaging system |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR840005926A (en) | Manufacturing Method of Semiconductor Integrated Circuit Device | |
JPS5546548A (en) | Electrostatic induction integrated circuit | |
ES8301391A1 (en) | High-voltage semiconductor switch. | |
JPS6427255A (en) | Manufacture of semiconductor device | |
JPS6481351A (en) | Manufacture of semiconductor device | |
JPS56108255A (en) | Semiconductor integrated circuit | |
JPS5615068A (en) | Semiconductor device and manufacture thereof | |
JPS53121587A (en) | Semiconductor device | |
JPS5762552A (en) | Manufacture of semiconductor device | |
JPS5582461A (en) | Semiconductor integrated circuit device | |
JPS6431452A (en) | Semiconductor integrated circuit containing current mirror | |
JPS6447064A (en) | Semiconductor device | |
JPS55145363A (en) | Semiconductor device | |
JPS54101289A (en) | Semiconductor device | |
JPS6477157A (en) | Insulated-gate field-effect semiconductor device | |
JPS60152053A (en) | I2l semiconductor device | |
JPS5618460A (en) | Semiconductor integrated circuit | |
JPS5735366A (en) | Semiconductor integrated circuit device | |
JPS5558546A (en) | Semiconductor logic circuit device | |
JPS56100460A (en) | Bipolar mos semiconductor device and manufacture thereof | |
JPS5710964A (en) | Manufacture of semiconductor device | |
JPS5732664A (en) | Semiconductor integrated circuit device | |
JPS5383584A (en) | Semiconductor logic element | |
JPS55160459A (en) | Semiconductor integrated circuit | |
JPS6435951A (en) | Semiconductor device |