JPS6423527A - Cantilever paddle - Google Patents
Cantilever paddleInfo
- Publication number
- JPS6423527A JPS6423527A JP17887587A JP17887587A JPS6423527A JP S6423527 A JPS6423527 A JP S6423527A JP 17887587 A JP17887587 A JP 17887587A JP 17887587 A JP17887587 A JP 17887587A JP S6423527 A JPS6423527 A JP S6423527A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- cantilever paddle
- wafer
- cantilever
- paddle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17887587A JPS6423527A (en) | 1987-07-20 | 1987-07-20 | Cantilever paddle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17887587A JPS6423527A (en) | 1987-07-20 | 1987-07-20 | Cantilever paddle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6423527A true JPS6423527A (en) | 1989-01-26 |
Family
ID=16056221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17887587A Pending JPS6423527A (en) | 1987-07-20 | 1987-07-20 | Cantilever paddle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6423527A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03162526A (ja) * | 1989-11-20 | 1991-07-12 | Mitsubishi Electric Corp | 加熱炉の材料昇温曲線決定方法 |
CN111081606A (zh) * | 2019-12-12 | 2020-04-28 | 浙江晶科能源有限公司 | 一种硅片镀膜设备及其桨 |
-
1987
- 1987-07-20 JP JP17887587A patent/JPS6423527A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03162526A (ja) * | 1989-11-20 | 1991-07-12 | Mitsubishi Electric Corp | 加熱炉の材料昇温曲線決定方法 |
CN111081606A (zh) * | 2019-12-12 | 2020-04-28 | 浙江晶科能源有限公司 | 一种硅片镀膜设备及其桨 |
CN111081606B (zh) * | 2019-12-12 | 2022-11-18 | 浙江晶科能源有限公司 | 一种硅片镀膜设备及其桨 |
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