JPS6422933A - Device for treating sheetlike material with plasma at low temperature - Google Patents
Device for treating sheetlike material with plasma at low temperatureInfo
- Publication number
- JPS6422933A JPS6422933A JP17865187A JP17865187A JPS6422933A JP S6422933 A JPS6422933 A JP S6422933A JP 17865187 A JP17865187 A JP 17865187A JP 17865187 A JP17865187 A JP 17865187A JP S6422933 A JPS6422933 A JP S6422933A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- electrode
- discharge
- discharge electrode
- drum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17865187A JPS6422933A (en) | 1987-07-16 | 1987-07-16 | Device for treating sheetlike material with plasma at low temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17865187A JPS6422933A (en) | 1987-07-16 | 1987-07-16 | Device for treating sheetlike material with plasma at low temperature |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422933A true JPS6422933A (en) | 1989-01-25 |
| JPH0443102B2 JPH0443102B2 (enrdf_load_stackoverflow) | 1992-07-15 |
Family
ID=16052190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17865187A Granted JPS6422933A (en) | 1987-07-16 | 1987-07-16 | Device for treating sheetlike material with plasma at low temperature |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422933A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003028465A (ja) * | 2001-07-16 | 2003-01-29 | Kiyoshi Ono | 小型漁船用の冷房装置 |
-
1987
- 1987-07-16 JP JP17865187A patent/JPS6422933A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003028465A (ja) * | 2001-07-16 | 2003-01-29 | Kiyoshi Ono | 小型漁船用の冷房装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0443102B2 (enrdf_load_stackoverflow) | 1992-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS55161341A (en) | Microwave ion source | |
| JPS52121838A (en) | High frequency heating device | |
| EP0364215A3 (en) | Plasma etching apparatus | |
| EP0641150A4 (en) | TREATMENT DEVICE. | |
| JPS57188670A (en) | Treatment of electrically conductive member | |
| JPS5721230A (en) | Positioning method in wire cut electric discharge processing | |
| JPS5676242A (en) | Treating apparatus using gas plasma reaction | |
| JPS6422933A (en) | Device for treating sheetlike material with plasma at low temperature | |
| JPS5590228A (en) | Dry etching device | |
| KR860000405A (ko) | 플라즈마 처리 방법 및 장치 | |
| JPS5610932A (en) | Plasma treating apparatus | |
| JPS6467908A (en) | Plasma processing device | |
| JPH1131600A5 (enrdf_load_stackoverflow) | ||
| JPS5472534A (en) | High frequency heating device | |
| JPS6414251A (en) | Apparatus for low-temperature plasma treatment of sheet | |
| JPS57114231A (en) | Plasma etching device | |
| JPS5687671A (en) | Dry etching apparatus | |
| JPS5794565A (en) | Surface treatment of pipe | |
| JPS54107893A (en) | Ozonizer | |
| JPS53141182A (en) | Plasma chemical vapor depositing device | |
| JPS5238200A (en) | Electric apparatus | |
| JPS6451471A (en) | Heat treatment of carbon black | |
| JPS5468169A (en) | Plasma processor of capacitor type | |
| JPS5638821A (en) | Dry etching device | |
| JPS6443716A (en) | Heat pipe heat insulation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |