JPS642201B2 - - Google Patents

Info

Publication number
JPS642201B2
JPS642201B2 JP70882A JP70882A JPS642201B2 JP S642201 B2 JPS642201 B2 JP S642201B2 JP 70882 A JP70882 A JP 70882A JP 70882 A JP70882 A JP 70882A JP S642201 B2 JPS642201 B2 JP S642201B2
Authority
JP
Japan
Prior art keywords
pattern
scanning
width dimension
calculated
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP70882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58117405A (ja
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP70882A priority Critical patent/JPS58117405A/ja
Publication of JPS58117405A publication Critical patent/JPS58117405A/ja
Publication of JPS642201B2 publication Critical patent/JPS642201B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electron Beam Exposure (AREA)
JP70882A 1982-01-05 1982-01-05 パタ−ン測定方法 Granted JPS58117405A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP70882A JPS58117405A (ja) 1982-01-05 1982-01-05 パタ−ン測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP70882A JPS58117405A (ja) 1982-01-05 1982-01-05 パタ−ン測定方法

Publications (2)

Publication Number Publication Date
JPS58117405A JPS58117405A (ja) 1983-07-13
JPS642201B2 true JPS642201B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-17

Family

ID=11481264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP70882A Granted JPS58117405A (ja) 1982-01-05 1982-01-05 パタ−ン測定方法

Country Status (1)

Country Link
JP (1) JPS58117405A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231205A (ja) * 1987-03-19 1988-09-27 Osaka Daiyamondo Kogyo Kk 輪郭形状の測定方法
KR100383258B1 (ko) * 2000-11-09 2003-05-09 삼성전자주식회사 주사 전자 현미경을 이용한 측정 장치의 측정 에러 검출방법
JP2007192594A (ja) * 2006-01-17 2007-08-02 Horon:Kk パターン画像取得方法およびパターン画像取得装置
JP5663195B2 (ja) * 2010-05-21 2015-02-04 株式会社日立ハイテクノロジーズ パターン寸法計測方法、パターン寸法計測装置、パターン寸法計測方法をコンピュータに実行させるプログラム及びこれを記録した記録媒体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS56164902A (en) * 1980-05-23 1981-12-18 Kawasaki Steel Corp Thickness measuring device

Also Published As

Publication number Publication date
JPS58117405A (ja) 1983-07-13

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