JPS642192B2 - - Google Patents
Info
- Publication number
- JPS642192B2 JPS642192B2 JP28312885A JP28312885A JPS642192B2 JP S642192 B2 JPS642192 B2 JP S642192B2 JP 28312885 A JP28312885 A JP 28312885A JP 28312885 A JP28312885 A JP 28312885A JP S642192 B2 JPS642192 B2 JP S642192B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction vessel
- raw material
- cylindrical
- exhaust
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 67
- 238000006243 chemical reaction Methods 0.000 claims description 49
- 239000002994 raw material Substances 0.000 claims description 41
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 74
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 16
- 229910021417 amorphous silicon Inorganic materials 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 150000004756 silanes Chemical class 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28312885A JPS62142772A (ja) | 1985-12-18 | 1985-12-18 | マイクロ波プラズマｃｖｄ法による堆積膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28312885A JPS62142772A (ja) | 1985-12-18 | 1985-12-18 | マイクロ波プラズマｃｖｄ法による堆積膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62142772A JPS62142772A (ja) | 1987-06-26 |
| JPS642192B2 true JPS642192B2 (enrdf_load_stackoverflow) | 1989-01-13 |
Family
ID=17661588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28312885A Granted JPS62142772A (ja) | 1985-12-18 | 1985-12-18 | マイクロ波プラズマｃｖｄ法による堆積膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142772A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3343805B2 (ja) * | 1995-08-15 | 2002-11-11 | 富士通株式会社 | ディスク装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6029470A (ja) * | 1983-07-27 | 1985-02-14 | Kyocera Corp | 量産型グロ−放電分解装置 |
-
1985
- 1985-12-18 JP JP28312885A patent/JPS62142772A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62142772A (ja) | 1987-06-26 |
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