JPS62142772A - マイクロ波プラズマｃｖｄ法による堆積膜形成装置 - Google Patents

マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Info

Publication number
JPS62142772A
JPS62142772A JP28312885A JP28312885A JPS62142772A JP S62142772 A JPS62142772 A JP S62142772A JP 28312885 A JP28312885 A JP 28312885A JP 28312885 A JP28312885 A JP 28312885A JP S62142772 A JPS62142772 A JP S62142772A
Authority
JP
Japan
Prior art keywords
deposited film
film forming
cvd method
raw material
reaction vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28312885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS642192B2 (enrdf_load_stackoverflow
Inventor
Shigeru Shirai
茂 白井
Masaya Kobayashi
雅也 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP28312885A priority Critical patent/JPS62142772A/ja
Publication of JPS62142772A publication Critical patent/JPS62142772A/ja
Publication of JPS642192B2 publication Critical patent/JPS642192B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP28312885A 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置 Granted JPS62142772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28312885A JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28312885A JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Publications (2)

Publication Number Publication Date
JPS62142772A true JPS62142772A (ja) 1987-06-26
JPS642192B2 JPS642192B2 (enrdf_load_stackoverflow) 1989-01-13

Family

ID=17661588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28312885A Granted JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Country Status (1)

Country Link
JP (1) JPS62142772A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5864447A (en) * 1995-08-15 1999-01-26 Fujitsu Limited Disk drive with stopper mechanism including a cushion member seated on a circumferential groove

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029470A (ja) * 1983-07-27 1985-02-14 Kyocera Corp 量産型グロ−放電分解装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029470A (ja) * 1983-07-27 1985-02-14 Kyocera Corp 量産型グロ−放電分解装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5864447A (en) * 1995-08-15 1999-01-26 Fujitsu Limited Disk drive with stopper mechanism including a cushion member seated on a circumferential groove

Also Published As

Publication number Publication date
JPS642192B2 (enrdf_load_stackoverflow) 1989-01-13

Similar Documents

Publication Publication Date Title
JPH04123257U (ja) バイアスｅｃｒプラズマｃｖｄ装置
JPH08100270A (ja) 薄膜形成装置
US4913928A (en) Microwave plasma chemical vapor deposition apparatus with magnet on waveguide
JP2520589B2 (ja) Ｃｖｄ法による堆積膜形成方法
JPH0568096B2 (enrdf_load_stackoverflow)
JPS62142772A (ja) マイクロ波プラズマｃｖｄ法による堆積膜形成装置
JPS62142783A (ja) プラズマｃｖｄ法による堆積膜形成装置
JP2553330B2 (ja) プラズマｃｖｄ法による機能性堆積膜形成装置
JPH04187592A (ja) Ｃｖｄ装置
JPS62235471A (ja) プラズマｃｖｄ法による堆積膜形成装置
JPS6086277A (ja) 放電による堆積膜の形成方法
JPH06232054A (ja) サセプタの製造方法
JP2553337B2 (ja) マイクロ波プラズマｃｖｄ法による機能性堆積膜形成装置
JPS63274770A (ja) 機能性堆積膜形成装置
JPH07161646A (ja) 多結晶膜作成方法
JP2609866B2 (ja) マイクロ波プラズマｃｖｄ装置
JPH04173976A (ja) 薄膜形成装置
JP2003218046A (ja) 発熱体ｃｖｄ装置及びこれを用いた発熱体ｃｖｄ方法
JPS6357779A (ja) マイクロ波プラズマｃｖｄ法による機能性堆積膜形成装置
JPS6244577A (ja) プラズマｃｖｄ法による堆積膜の量産装置
JPS62196377A (ja) プラズマｃｖｄ法による堆積膜形成装置
JPS62224679A (ja) プラズマｃｖｄ法による堆積膜形成装置
JPS6280275A (ja) 化学的気相法による堆積膜形成方法及びこれに用いる装置
JPS62224673A (ja) 堆積膜形成法
JPH03202467A (ja) 高周波プラズマ素材プロセッシング装置