JPS642176U - - Google Patents
Info
- Publication number
- JPS642176U JPS642176U JP9706087U JP9706087U JPS642176U JP S642176 U JPS642176 U JP S642176U JP 9706087 U JP9706087 U JP 9706087U JP 9706087 U JP9706087 U JP 9706087U JP S642176 U JPS642176 U JP S642176U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- temperature
- constant
- sample
- circulation path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005494 condensation Effects 0.000 claims description 4
- 238000009833 condensation Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9706087U JPS642176U (enExample) | 1987-06-23 | 1987-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9706087U JPS642176U (enExample) | 1987-06-23 | 1987-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642176U true JPS642176U (enExample) | 1989-01-09 |
Family
ID=30963589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9706087U Pending JPS642176U (enExample) | 1987-06-23 | 1987-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642176U (enExample) |
-
1987
- 1987-06-23 JP JP9706087U patent/JPS642176U/ja active Pending
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