JPS642176U - - Google Patents

Info

Publication number
JPS642176U
JPS642176U JP9706087U JP9706087U JPS642176U JP S642176 U JPS642176 U JP S642176U JP 9706087 U JP9706087 U JP 9706087U JP 9706087 U JP9706087 U JP 9706087U JP S642176 U JPS642176 U JP S642176U
Authority
JP
Japan
Prior art keywords
chamber
temperature
constant
sample
circulation path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9706087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9706087U priority Critical patent/JPS642176U/ja
Publication of JPS642176U publication Critical patent/JPS642176U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
JP9706087U 1987-06-23 1987-06-23 Pending JPS642176U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9706087U JPS642176U (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9706087U JPS642176U (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Publications (1)

Publication Number Publication Date
JPS642176U true JPS642176U (enrdf_load_stackoverflow) 1989-01-09

Family

ID=30963589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9706087U Pending JPS642176U (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Country Status (1)

Country Link
JP (1) JPS642176U (enrdf_load_stackoverflow)

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