JPS6421072A - Apparatus for melting and evaporating material - Google Patents
Apparatus for melting and evaporating materialInfo
- Publication number
- JPS6421072A JPS6421072A JP17799487A JP17799487A JPS6421072A JP S6421072 A JPS6421072 A JP S6421072A JP 17799487 A JP17799487 A JP 17799487A JP 17799487 A JP17799487 A JP 17799487A JP S6421072 A JPS6421072 A JP S6421072A
- Authority
- JP
- Japan
- Prior art keywords
- melting
- evaporating
- crucible
- evaporated
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To reduce heat loss, to effectively utilize a material to be evaporated and to prolong the duration of evaporation by providing a prescribed convection inhibiting plate which encloses an evaporating part in a crucible in an apparatus for melting and evaporating a material by irradiation with energy beams. CONSTITUTION:A convection inhibiting plate 1 which encloses an evaporating part (c) is placed in a crucible 2 in an apparatus for melting and evaporating a material, and a material 4 to be evaporated in the crucible 2 is melted and evaporated by irradiation with energy beams (b). The top 1a of the convection inhibiting plate 1 is positioned above the surface of the molten material 4. A path 3 is formed under the bottom of the plate 1 so as to circulate the materials 4, 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17799487A JPS6421072A (en) | 1987-07-16 | 1987-07-16 | Apparatus for melting and evaporating material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17799487A JPS6421072A (en) | 1987-07-16 | 1987-07-16 | Apparatus for melting and evaporating material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6421072A true JPS6421072A (en) | 1989-01-24 |
Family
ID=16040683
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17799487A Pending JPS6421072A (en) | 1987-07-16 | 1987-07-16 | Apparatus for melting and evaporating material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6421072A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010280965A (en) * | 2009-06-05 | 2010-12-16 | Panasonic Corp | Vapor deposition system |
JP2015190051A (en) * | 2014-03-28 | 2015-11-02 | 住友金属鉱山株式会社 | Method and apparatus for production of solder ball |
WO2020044521A1 (en) * | 2018-08-30 | 2020-03-05 | シャープ株式会社 | Vapor deposition apparatus and vapor deposition method of vapor deposition apparatus |
-
1987
- 1987-07-16 JP JP17799487A patent/JPS6421072A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010280965A (en) * | 2009-06-05 | 2010-12-16 | Panasonic Corp | Vapor deposition system |
JP2015190051A (en) * | 2014-03-28 | 2015-11-02 | 住友金属鉱山株式会社 | Method and apparatus for production of solder ball |
WO2020044521A1 (en) * | 2018-08-30 | 2020-03-05 | シャープ株式会社 | Vapor deposition apparatus and vapor deposition method of vapor deposition apparatus |
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