JPS6421072A - Apparatus for melting and evaporating material - Google Patents

Apparatus for melting and evaporating material

Info

Publication number
JPS6421072A
JPS6421072A JP17799487A JP17799487A JPS6421072A JP S6421072 A JPS6421072 A JP S6421072A JP 17799487 A JP17799487 A JP 17799487A JP 17799487 A JP17799487 A JP 17799487A JP S6421072 A JPS6421072 A JP S6421072A
Authority
JP
Japan
Prior art keywords
melting
evaporating
crucible
evaporated
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17799487A
Other languages
Japanese (ja)
Inventor
Toyohiko Horikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17799487A priority Critical patent/JPS6421072A/en
Publication of JPS6421072A publication Critical patent/JPS6421072A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To reduce heat loss, to effectively utilize a material to be evaporated and to prolong the duration of evaporation by providing a prescribed convection inhibiting plate which encloses an evaporating part in a crucible in an apparatus for melting and evaporating a material by irradiation with energy beams. CONSTITUTION:A convection inhibiting plate 1 which encloses an evaporating part (c) is placed in a crucible 2 in an apparatus for melting and evaporating a material, and a material 4 to be evaporated in the crucible 2 is melted and evaporated by irradiation with energy beams (b). The top 1a of the convection inhibiting plate 1 is positioned above the surface of the molten material 4. A path 3 is formed under the bottom of the plate 1 so as to circulate the materials 4, 5.
JP17799487A 1987-07-16 1987-07-16 Apparatus for melting and evaporating material Pending JPS6421072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17799487A JPS6421072A (en) 1987-07-16 1987-07-16 Apparatus for melting and evaporating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17799487A JPS6421072A (en) 1987-07-16 1987-07-16 Apparatus for melting and evaporating material

Publications (1)

Publication Number Publication Date
JPS6421072A true JPS6421072A (en) 1989-01-24

Family

ID=16040683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17799487A Pending JPS6421072A (en) 1987-07-16 1987-07-16 Apparatus for melting and evaporating material

Country Status (1)

Country Link
JP (1) JPS6421072A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010280965A (en) * 2009-06-05 2010-12-16 Panasonic Corp Vapor deposition system
JP2015190051A (en) * 2014-03-28 2015-11-02 住友金属鉱山株式会社 Method and apparatus for production of solder ball
WO2020044521A1 (en) * 2018-08-30 2020-03-05 シャープ株式会社 Vapor deposition apparatus and vapor deposition method of vapor deposition apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010280965A (en) * 2009-06-05 2010-12-16 Panasonic Corp Vapor deposition system
JP2015190051A (en) * 2014-03-28 2015-11-02 住友金属鉱山株式会社 Method and apparatus for production of solder ball
WO2020044521A1 (en) * 2018-08-30 2020-03-05 シャープ株式会社 Vapor deposition apparatus and vapor deposition method of vapor deposition apparatus

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