JPS6419909U - - Google Patents

Info

Publication number
JPS6419909U
JPS6419909U JP11432287U JP11432287U JPS6419909U JP S6419909 U JPS6419909 U JP S6419909U JP 11432287 U JP11432287 U JP 11432287U JP 11432287 U JP11432287 U JP 11432287U JP S6419909 U JPS6419909 U JP S6419909U
Authority
JP
Japan
Prior art keywords
objective lens
detection element
control signal
light
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11432287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11432287U priority Critical patent/JPS6419909U/ja
Publication of JPS6419909U publication Critical patent/JPS6419909U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
JP11432287U 1987-07-25 1987-07-25 Pending JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11432287U JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-25 1987-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11432287U JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-25 1987-07-25

Publications (1)

Publication Number Publication Date
JPS6419909U true JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-31

Family

ID=31354960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11432287U Pending JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-25 1987-07-25

Country Status (1)

Country Link
JP (1) JPS6419909U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136149A (en) * 1990-04-23 1992-08-04 Dainippon Screen Mfg. Co., Ltd. Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177508A (ja) * 1983-03-29 1984-10-08 Olympus Optical Co Ltd 自動焦点装置を備えた顕微鏡
JPS62131219A (ja) * 1985-12-02 1987-06-13 Olympus Optical Co Ltd 自動焦点顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177508A (ja) * 1983-03-29 1984-10-08 Olympus Optical Co Ltd 自動焦点装置を備えた顕微鏡
JPS62131219A (ja) * 1985-12-02 1987-06-13 Olympus Optical Co Ltd 自動焦点顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136149A (en) * 1990-04-23 1992-08-04 Dainippon Screen Mfg. Co., Ltd. Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection
EP0453946B1 (en) * 1990-04-23 1996-09-18 Dainippon Screen Mfg. Co., Ltd. Method of focusing optical head on object body and optical inspection system comprising an automatic focusing device

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