JPS641942B2 - - Google Patents

Info

Publication number
JPS641942B2
JPS641942B2 JP55174224A JP17422480A JPS641942B2 JP S641942 B2 JPS641942 B2 JP S641942B2 JP 55174224 A JP55174224 A JP 55174224A JP 17422480 A JP17422480 A JP 17422480A JP S641942 B2 JPS641942 B2 JP S641942B2
Authority
JP
Japan
Prior art keywords
silicon dioxide
dioxide film
film
forming
corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55174224A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5797672A (en
Inventor
Toshuki Ishijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP55174224A priority Critical patent/JPS5797672A/ja
Publication of JPS5797672A publication Critical patent/JPS5797672A/ja
Publication of JPS641942B2 publication Critical patent/JPS641942B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP55174224A 1980-12-10 1980-12-10 Manufacture of semiconductor device Granted JPS5797672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55174224A JPS5797672A (en) 1980-12-10 1980-12-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55174224A JPS5797672A (en) 1980-12-10 1980-12-10 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5797672A JPS5797672A (en) 1982-06-17
JPS641942B2 true JPS641942B2 (enrdf_load_stackoverflow) 1989-01-13

Family

ID=15974888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55174224A Granted JPS5797672A (en) 1980-12-10 1980-12-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5797672A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08250486A (ja) * 1996-03-08 1996-09-27 Semiconductor Energy Lab Co Ltd 半導体装置
US5846862A (en) 1997-05-20 1998-12-08 Advanced Micro Devices Semiconductor device having a vertical active region and method of manufacture thereof

Also Published As

Publication number Publication date
JPS5797672A (en) 1982-06-17

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