JPS6418568U - - Google Patents

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Publication number
JPS6418568U
JPS6418568U JP11194787U JP11194787U JPS6418568U JP S6418568 U JPS6418568 U JP S6418568U JP 11194787 U JP11194787 U JP 11194787U JP 11194787 U JP11194787 U JP 11194787U JP S6418568 U JPS6418568 U JP S6418568U
Authority
JP
Japan
Prior art keywords
extraction electrode
flow extraction
ion flow
aluminum plate
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11194787U
Other languages
English (en)
Other versions
JPH0610608Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111947U priority Critical patent/JPH0610608Y2/ja
Publication of JPS6418568U publication Critical patent/JPS6418568U/ja
Application granted granted Critical
Publication of JPH0610608Y2 publication Critical patent/JPH0610608Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図はイオンビーム加工装置の構成を示す摸
式的断面図、第２図、第３図はこの考案によるイ
オン流引き出し電極の構成を示す図。 １はプラズマ発生室、２はイオン流引き出し電
極、３は加工室、２１は絶縁体、２２は導体、２
３は小孔。なお、各図中同一符号は同一又は相当
部分を示すものとする。

Claims (1)

  1. 【実用新案登録請求の範囲】 プラズマを発生するプラズマ発生室で発生した
    イオンをイオンビームとして加工室内へ引き出す
    ための電界を形成するイオン流引き出し電極にお
    いて、 上記イオン流引き出し電極は、板面に垂直な方
    向に多数の小孔が開けられたアルミニウム板を素
    材とし、このアルミニウム板の片面にアルマイト
    加工による酸化被膜を構成したことを特徴とする
    イオン流引き出し電極。
JP1987111947U 1987-07-23 1987-07-23 イオン流引き出し電極 Expired - Lifetime JPH0610608Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111947U JPH0610608Y2 (ja) 1987-07-23 1987-07-23 イオン流引き出し電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111947U JPH0610608Y2 (ja) 1987-07-23 1987-07-23 イオン流引き出し電極

Publications (2)

Publication Number Publication Date
JPS6418568U true JPS6418568U (ja) 1989-01-30
JPH0610608Y2 JPH0610608Y2 (ja) 1994-03-16

Family

ID=31350446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111947U Expired - Lifetime JPH0610608Y2 (ja) 1987-07-23 1987-07-23 イオン流引き出し電極

Country Status (1)

Country Link
JP (1) JPH0610608Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5611480A (en) * 1992-03-03 1997-03-18 Pillarhouse International Limited Soldering process

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4966352U (ja) * 1972-09-21 1974-06-10
JPS6020440A (ja) * 1983-07-14 1985-02-01 Tokyo Daigaku イオンビ−ム加工装置
JPS60243954A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd イオン源

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4966352U (ja) * 1972-09-21 1974-06-10
JPS6020440A (ja) * 1983-07-14 1985-02-01 Tokyo Daigaku イオンビ−ム加工装置
JPS60243954A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5611480A (en) * 1992-03-03 1997-03-18 Pillarhouse International Limited Soldering process

Also Published As

Publication number Publication date
JPH0610608Y2 (ja) 1994-03-16

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