JPS6414995A - Manufacture of multilayered substrate - Google Patents
Manufacture of multilayered substrateInfo
- Publication number
- JPS6414995A JPS6414995A JP16963887A JP16963887A JPS6414995A JP S6414995 A JPS6414995 A JP S6414995A JP 16963887 A JP16963887 A JP 16963887A JP 16963887 A JP16963887 A JP 16963887A JP S6414995 A JPS6414995 A JP S6414995A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- multilayered substrate
- pentene
- 1mum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
PURPOSE:To simplify the manufacturing process of a multilayered substrate and to lessen the delay of signal propagation by a method wherein a polymethyl pentene film is used as an organic film. CONSTITUTION:A first wiring layer 2 is formed on an alumina substrate 1 using a Cu deposited film of a thickness of 1mum, then a polymethyl pentene polymerized film of a thickness of 3mum is formed by plasma polymerization using 1-methyl-4 pentene as a monomer to use as an insulating layer 3. A KrF excimer laser is irradiated locally on the polymethyl pentene film to form a through hole 4 of a size of 10mum and a second wiring layer 5 is formed using an Au deposited film of a thickness of 1mum to complete a multilayered substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16963887A JPH088418B2 (en) | 1987-07-09 | 1987-07-09 | Multilayer substrate and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16963887A JPH088418B2 (en) | 1987-07-09 | 1987-07-09 | Multilayer substrate and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6414995A true JPS6414995A (en) | 1989-01-19 |
JPH088418B2 JPH088418B2 (en) | 1996-01-29 |
Family
ID=15890202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16963887A Expired - Lifetime JPH088418B2 (en) | 1987-07-09 | 1987-07-09 | Multilayer substrate and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH088418B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009191519A (en) * | 2008-02-14 | 2009-08-27 | Hitachi Constr Mach Co Ltd | Coupler device for construction machine |
CN107619264A (en) * | 2017-10-16 | 2018-01-23 | 深圳市商德先进陶瓷股份有限公司 | Aluminium oxide ceramic substrate and its preparation method and application |
-
1987
- 1987-07-09 JP JP16963887A patent/JPH088418B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009191519A (en) * | 2008-02-14 | 2009-08-27 | Hitachi Constr Mach Co Ltd | Coupler device for construction machine |
CN107619264A (en) * | 2017-10-16 | 2018-01-23 | 深圳市商德先进陶瓷股份有限公司 | Aluminium oxide ceramic substrate and its preparation method and application |
Also Published As
Publication number | Publication date |
---|---|
JPH088418B2 (en) | 1996-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 12 |