JPS6414916A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6414916A
JPS6414916A JP62171830A JP17183087A JPS6414916A JP S6414916 A JPS6414916 A JP S6414916A JP 62171830 A JP62171830 A JP 62171830A JP 17183087 A JP17183087 A JP 17183087A JP S6414916 A JPS6414916 A JP S6414916A
Authority
JP
Japan
Prior art keywords
layer
mask
film
type impurity
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62171830A
Other languages
Japanese (ja)
Inventor
Terumine Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP62171830A priority Critical patent/JPS6414916A/en
Publication of JPS6414916A publication Critical patent/JPS6414916A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To perform a patterning necessary to define a P-type semiconductor region and an N-type semiconductor region by once by implanting a P-type impurity to a semiconductor layer, oxidizing a surface, and implanting an N-type impurity to the semiconductor layer with the oxide part of the semiconductor layer surface as a mask. CONSTITUTION:A crystalline silicon layer 3 is formed on the oxide film 2 of a silicon semiconductor substrate 1, an anti-oxidation layer 4 made of Si3N4 to become an anti-oxidation mask layer is formed thereon, coated with a photoresist film 5, exposed and developed. with the film 5 as a mask the layer 4 is etched to form an anti-oxidation mask layer 4a. With the layer 4a as a mask a P-type impurity is implanted into the layer 3. The surface of the layer 4 is thermally oxidized to form an oxide film 6. The layer 4a is removed, with the film 6 as a mask an N-type impurity, such as arsenic As is implanted to the layer 3, and the film 6 is removed.
JP62171830A 1987-07-09 1987-07-09 Manufacture of semiconductor device Pending JPS6414916A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171830A JPS6414916A (en) 1987-07-09 1987-07-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171830A JPS6414916A (en) 1987-07-09 1987-07-09 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6414916A true JPS6414916A (en) 1989-01-19

Family

ID=15930533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171830A Pending JPS6414916A (en) 1987-07-09 1987-07-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6414916A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003090314A (en) * 2001-09-19 2003-03-28 Aisin Seiki Co Ltd Clip
JP2005172238A (en) * 2003-12-11 2005-06-30 Newfrey Llc Fastener
US8371960B2 (en) 2007-10-29 2013-02-12 Bridgestone Sports Co., Ltd. Multi-piece solid golf ball
US8827838B2 (en) 2007-10-29 2014-09-09 Bridgestone Sports Co., Ltd. Multi-piece solid golf ball

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003090314A (en) * 2001-09-19 2003-03-28 Aisin Seiki Co Ltd Clip
JP2005172238A (en) * 2003-12-11 2005-06-30 Newfrey Llc Fastener
US8371960B2 (en) 2007-10-29 2013-02-12 Bridgestone Sports Co., Ltd. Multi-piece solid golf ball
US8827838B2 (en) 2007-10-29 2014-09-09 Bridgestone Sports Co., Ltd. Multi-piece solid golf ball

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