JPS6414189A - Growing device for crystal of semiconductor - Google Patents
Growing device for crystal of semiconductorInfo
- Publication number
- JPS6414189A JPS6414189A JP17183887A JP17183887A JPS6414189A JP S6414189 A JPS6414189 A JP S6414189A JP 17183887 A JP17183887 A JP 17183887A JP 17183887 A JP17183887 A JP 17183887A JP S6414189 A JPS6414189 A JP S6414189A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- crucible
- semiconductor
- conductive material
- inferior heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17183887A JPS6414189A (en) | 1987-07-09 | 1987-07-09 | Growing device for crystal of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17183887A JPS6414189A (en) | 1987-07-09 | 1987-07-09 | Growing device for crystal of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6414189A true JPS6414189A (en) | 1989-01-18 |
Family
ID=15930693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17183887A Pending JPS6414189A (en) | 1987-07-09 | 1987-07-09 | Growing device for crystal of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6414189A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011195375A (ja) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | 単結晶成長方法および装置 |
JP2012111648A (ja) * | 2010-11-22 | 2012-06-14 | Toyo Tanso Kk | 単結晶引き上げ装置、及び単結晶引き上げ装置に用いられる低熱伝導性部材 |
US9453291B2 (en) | 2010-11-22 | 2016-09-27 | Toyo Tanso Co., Ltd. | Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58125689A (ja) * | 1982-01-21 | 1983-07-26 | Toshiba Ceramics Co Ltd | 単結晶引上げ用黒鉛ルツボ |
JPS62119198A (ja) * | 1985-11-19 | 1987-05-30 | Mitsubishi Monsanto Chem Co | 磁場印加単結晶回転引き上げ装置 |
-
1987
- 1987-07-09 JP JP17183887A patent/JPS6414189A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58125689A (ja) * | 1982-01-21 | 1983-07-26 | Toshiba Ceramics Co Ltd | 単結晶引上げ用黒鉛ルツボ |
JPS62119198A (ja) * | 1985-11-19 | 1987-05-30 | Mitsubishi Monsanto Chem Co | 磁場印加単結晶回転引き上げ装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011195375A (ja) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | 単結晶成長方法および装置 |
JP2012111648A (ja) * | 2010-11-22 | 2012-06-14 | Toyo Tanso Kk | 単結晶引き上げ装置、及び単結晶引き上げ装置に用いられる低熱伝導性部材 |
US9453291B2 (en) | 2010-11-22 | 2016-09-27 | Toyo Tanso Co., Ltd. | Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus |
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