JPS6413439A - Light absorbing gas sensor - Google Patents

Light absorbing gas sensor

Info

Publication number
JPS6413439A
JPS6413439A JP17080787A JP17080787A JPS6413439A JP S6413439 A JPS6413439 A JP S6413439A JP 17080787 A JP17080787 A JP 17080787A JP 17080787 A JP17080787 A JP 17080787A JP S6413439 A JPS6413439 A JP S6413439A
Authority
JP
Japan
Prior art keywords
gas
measured
liquid
semiconductor
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17080787A
Other languages
Japanese (ja)
Other versions
JPH0684937B2 (en
Inventor
Yoshio Watanabe
Yuji Miyahara
Hiroyuki Miyagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17080787A priority Critical patent/JPH0684937B2/en
Publication of JPS6413439A publication Critical patent/JPS6413439A/en
Publication of JPH0684937B2 publication Critical patent/JPH0684937B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To reduce the size of a sensor and to take a measurement in gas or liquid by providing a light emission part and a light reception part consisting of P-N junctions on the opposite side walls of a recessed part formed in the surface of a semiconductor substrate or further covering the recessed part with a gas permeable film. CONSTITUTION:The sensor which measures gas to be measured in gas consists of a semiconductor laser 1, an optical path groove 2, a semiconductor photodetecting element 3, and a semiconductor substrate 4. When gas to be measured in liquid is measured, the gas permeable film 7 such as a silicone rubber is fixed by a film presser 8 in said constitution and either one is constitut ed by a semiconductor manufacture process. Then the gas is admitted into a groove 2 according to the concentration of the gas to be measured in ambient gas 5 or liquid 9 and laser light 6 is absorbed while passing the groove 2; and the attenuated light is detected by the element 3 and the concentration and partial pressure of the gas to be measured are found from the absorbance. The size is therefore reduced by the manufacture process and the gas to be measured in the gas and liquid can be measured.
JP17080787A 1987-07-08 1987-07-08 Light absorbing gas sensor Expired - Lifetime JPH0684937B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17080787A JPH0684937B2 (en) 1987-07-08 1987-07-08 Light absorbing gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17080787A JPH0684937B2 (en) 1987-07-08 1987-07-08 Light absorbing gas sensor

Publications (2)

Publication Number Publication Date
JPS6413439A true JPS6413439A (en) 1989-01-18
JPH0684937B2 JPH0684937B2 (en) 1994-10-26

Family

ID=15911703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17080787A Expired - Lifetime JPH0684937B2 (en) 1987-07-08 1987-07-08 Light absorbing gas sensor

Country Status (1)

Country Link
JP (1) JPH0684937B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08502799A (en) * 1992-08-14 1996-03-26 テロン・インターナショナル・ビルディング・テクノロジィズ・リミテッド How to build a bridge
JP2008525815A (en) * 2004-12-29 2008-07-17 センスエア アーベー Gas detection configuration
WO2008145115A3 (en) * 2007-05-25 2009-04-16 Fraunhofer Ges Forschung Device and method for determining the permeation rate of at least one permeate through an element that forms a diffusion barrier
WO2012140485A1 (en) * 2011-04-11 2012-10-18 パナソニック株式会社 Gas component detection device
WO2012140482A1 (en) * 2011-04-11 2012-10-18 パナソニック株式会社 Gas component detection device
US8636956B2 (en) 2001-03-08 2014-01-28 Nihon Kohden Corporation Sensor for measuring carbon dioxide in respiratory gas

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08502799A (en) * 1992-08-14 1996-03-26 テロン・インターナショナル・ビルディング・テクノロジィズ・リミテッド How to build a bridge
US8636956B2 (en) 2001-03-08 2014-01-28 Nihon Kohden Corporation Sensor for measuring carbon dioxide in respiratory gas
JP2008525815A (en) * 2004-12-29 2008-07-17 センスエア アーベー Gas detection configuration
US8257655B2 (en) 2004-12-29 2012-09-04 Senseair Ab Gas detecting arrangement
WO2008145115A3 (en) * 2007-05-25 2009-04-16 Fraunhofer Ges Forschung Device and method for determining the permeation rate of at least one permeate through an element that forms a diffusion barrier
WO2012140485A1 (en) * 2011-04-11 2012-10-18 パナソニック株式会社 Gas component detection device
WO2012140482A1 (en) * 2011-04-11 2012-10-18 パナソニック株式会社 Gas component detection device
JP2012220351A (en) * 2011-04-11 2012-11-12 Panasonic Corp Gas component detector
US9134224B2 (en) 2011-04-11 2015-09-15 Panasonic Intellectual Property Management Co., Ltd. Gas component detection device

Also Published As

Publication number Publication date
JPH0684937B2 (en) 1994-10-26

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