JPS6412453A - Ion implanter - Google Patents
Ion implanterInfo
- Publication number
- JPS6412453A JPS6412453A JP62168000A JP16800087A JPS6412453A JP S6412453 A JPS6412453 A JP S6412453A JP 62168000 A JP62168000 A JP 62168000A JP 16800087 A JP16800087 A JP 16800087A JP S6412453 A JPS6412453 A JP S6412453A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- slit
- driving mechanism
- direction driving
- adjusted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- LYKJEJVAXSGWAJ-UHFFFAOYSA-N compactone Natural products CC1(C)CCCC2(C)C1CC(=O)C3(O)CC(C)(CCC23)C=C LYKJEJVAXSGWAJ-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To simplify an operating mechanism of an electrode by integrating a spacing adjusting mechanism, tilt correcting mechanism, and beam width adjusting mechanism into a body. CONSTITUTION:When the spacing between an ion drawing electrode 2 and an ion generating chamber is to be adjusted, an rotary shaft 13 is rotated around an axis A by an angle alpha through a Z direction driving mechanism 15. Then a theta direction driving mechanism is operated to correct the tilt of the electrode to make it be in parallel to a wall surface 1b on the slit side. The deviation quantity b caused by this operation can be neglected because an angle alpha is very small. The deviation in X direction between the slit of the electrode 2 and the slit of the ion generating chamber can be adjusted by moving an adjusting shaft 14 in its axis direction with the use of an X direction driving mechanism 17. The device thereby can be constituted with a small number of parts and the structure is simplified to be a compact one.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62168000A JPS6412453A (en) | 1987-07-06 | 1987-07-06 | Ion implanter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62168000A JPS6412453A (en) | 1987-07-06 | 1987-07-06 | Ion implanter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6412453A true JPS6412453A (en) | 1989-01-17 |
Family
ID=15859943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62168000A Pending JPS6412453A (en) | 1987-07-06 | 1987-07-06 | Ion implanter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6412453A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19901172C2 (en) * | 1998-07-15 | 2001-04-26 | Mitsubishi Electric Corp | High-voltage transformer and method for manufacturing the high-voltage transformer |
US20150366044A1 (en) * | 2013-02-04 | 2015-12-17 | Exogenesis Corporation | Method and apparatus for directing a neutral beam |
-
1987
- 1987-07-06 JP JP62168000A patent/JPS6412453A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19901172C2 (en) * | 1998-07-15 | 2001-04-26 | Mitsubishi Electric Corp | High-voltage transformer and method for manufacturing the high-voltage transformer |
US20150366044A1 (en) * | 2013-02-04 | 2015-12-17 | Exogenesis Corporation | Method and apparatus for directing a neutral beam |
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