JPS6412453A - Ion implanter - Google Patents

Ion implanter

Info

Publication number
JPS6412453A
JPS6412453A JP62168000A JP16800087A JPS6412453A JP S6412453 A JPS6412453 A JP S6412453A JP 62168000 A JP62168000 A JP 62168000A JP 16800087 A JP16800087 A JP 16800087A JP S6412453 A JPS6412453 A JP S6412453A
Authority
JP
Japan
Prior art keywords
electrode
slit
driving mechanism
direction driving
adjusted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62168000A
Other languages
Japanese (ja)
Inventor
Noriomi Miyoshi
Akinari Hirao
Makoto Koguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62168000A priority Critical patent/JPS6412453A/en
Publication of JPS6412453A publication Critical patent/JPS6412453A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To simplify an operating mechanism of an electrode by integrating a spacing adjusting mechanism, tilt correcting mechanism, and beam width adjusting mechanism into a body. CONSTITUTION:When the spacing between an ion drawing electrode 2 and an ion generating chamber is to be adjusted, an rotary shaft 13 is rotated around an axis A by an angle alpha through a Z direction driving mechanism 15. Then a theta direction driving mechanism is operated to correct the tilt of the electrode to make it be in parallel to a wall surface 1b on the slit side. The deviation quantity b caused by this operation can be neglected because an angle alpha is very small. The deviation in X direction between the slit of the electrode 2 and the slit of the ion generating chamber can be adjusted by moving an adjusting shaft 14 in its axis direction with the use of an X direction driving mechanism 17. The device thereby can be constituted with a small number of parts and the structure is simplified to be a compact one.
JP62168000A 1987-07-06 1987-07-06 Ion implanter Pending JPS6412453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62168000A JPS6412453A (en) 1987-07-06 1987-07-06 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62168000A JPS6412453A (en) 1987-07-06 1987-07-06 Ion implanter

Publications (1)

Publication Number Publication Date
JPS6412453A true JPS6412453A (en) 1989-01-17

Family

ID=15859943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62168000A Pending JPS6412453A (en) 1987-07-06 1987-07-06 Ion implanter

Country Status (1)

Country Link
JP (1) JPS6412453A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19901172C2 (en) * 1998-07-15 2001-04-26 Mitsubishi Electric Corp High-voltage transformer and method for manufacturing the high-voltage transformer
US20150366044A1 (en) * 2013-02-04 2015-12-17 Exogenesis Corporation Method and apparatus for directing a neutral beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19901172C2 (en) * 1998-07-15 2001-04-26 Mitsubishi Electric Corp High-voltage transformer and method for manufacturing the high-voltage transformer
US20150366044A1 (en) * 2013-02-04 2015-12-17 Exogenesis Corporation Method and apparatus for directing a neutral beam

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