JPS6454654A - Ion implanting device - Google Patents
Ion implanting deviceInfo
- Publication number
- JPS6454654A JPS6454654A JP62210830A JP21083087A JPS6454654A JP S6454654 A JPS6454654 A JP S6454654A JP 62210830 A JP62210830 A JP 62210830A JP 21083087 A JP21083087 A JP 21083087A JP S6454654 A JPS6454654 A JP S6454654A
- Authority
- JP
- Japan
- Prior art keywords
- housing
- ion beam
- ion
- ion source
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 abstract 6
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To accord an aperture shape with an ion beam shape so as to improve use efficiency of the ion beam by rotating, with an ion beam shaft as the center, a ion source and a drawing electrode at the same time. CONSTITUTION:An ion source housing 11 is held, in the condition where the rotation is possible with a bearing 12 round an ion beam shaft as the center, by a base 10. For housing 11, a link 13 mounted to the housing 11 is connected to a driving screw 14 and the screw 14 is engaged with a shaft 15a interlocking with a motor 15 and the screw is retreated by the rotation of the motor 15, thus the housing 11 fixed with a drawing electrode 17 at the front of the ion source 16 is rotated normally or reversely with a beam shaft as the center. In operation, after starting the operation of the ion source 16, various kinds of adjustments are executed and further the angle of the ion source housing 11 is rotated into the position where the shape of each part aperture where an ion beam b passes through agree with that of the ion beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62210830A JPS6454654A (en) | 1987-08-25 | 1987-08-25 | Ion implanting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62210830A JPS6454654A (en) | 1987-08-25 | 1987-08-25 | Ion implanting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454654A true JPS6454654A (en) | 1989-03-02 |
Family
ID=16595820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62210830A Pending JPS6454654A (en) | 1987-08-25 | 1987-08-25 | Ion implanting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454654A (en) |
-
1987
- 1987-08-25 JP JP62210830A patent/JPS6454654A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0349230A3 (en) | Alarm apparatus | |
| AU8386691A (en) | Grass trimming device | |
| US3760673A (en) | Plastic cutting machine | |
| ES476974A1 (en) | Mixing mechanism for a mixing machine | |
| JPS6454654A (en) | Ion implanting device | |
| ES480124A1 (en) | Electric discharge machine with mechanism for orbiting the electrode. | |
| FR2330295A1 (en) | Fixing for rotary hoe blades to hub - using two cutouts at right angles fitting over bolts holding clamp plate in position | |
| JPS56123771A (en) | Convertor for electric machine for minute displacement | |
| DE19600066A1 (en) | Ball spinning top for use as toy | |
| CA2173128A1 (en) | Positive displacement pump apparatus | |
| JPS6458468A (en) | Phase indexing device of crank pin grinder | |
| JPH0239761Y2 (en) | ||
| SU887064A1 (en) | Self-rotating cutting tool | |
| JPS6458546A (en) | Printing apparatus | |
| JPS643948A (en) | Variable-width slit for large-current ion beam | |
| JPS5680382A (en) | Impeller welding jig | |
| JPS5585013A (en) | Winding machine | |
| JPS6422366A (en) | Differential rotating speed mechanism for horizontal automatic centrifugal separator | |
| JPS6412453A (en) | Ion implanter | |
| SU631268A1 (en) | Spindle drive for vibratory cutting | |
| JPS5221868A (en) | Drive control mechanism for clock stepping motor | |
| JPS5499444A (en) | Light deflector | |
| JPS5330097A (en) | Electrical discharge machine | |
| JPS5434961A (en) | Rotary electric razor | |
| SU679347A2 (en) | Tube-cutting machine |