JPS5648054A - Accurate slit device - Google Patents

Accurate slit device

Info

Publication number
JPS5648054A
JPS5648054A JP12392379A JP12392379A JPS5648054A JP S5648054 A JPS5648054 A JP S5648054A JP 12392379 A JP12392379 A JP 12392379A JP 12392379 A JP12392379 A JP 12392379A JP S5648054 A JPS5648054 A JP S5648054A
Authority
JP
Japan
Prior art keywords
slit
bellows
shaft
holder
tubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12392379A
Other languages
Japanese (ja)
Inventor
Masayoshi Yano
Toshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12392379A priority Critical patent/JPS5648054A/en
Publication of JPS5648054A publication Critical patent/JPS5648054A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/067Ion lenses, apertures, skimmers

Abstract

PURPOSE:To improve the resolution of an equipment that uses a precise slit, by separately adjusting width, position and slope of the slit and eliminating their mutual effect. CONSTITUTION:A flange 1, tubes 2, 3 and a shaft 4 are constructed as an integral unit by air tightly vacuum welding bellows 8, 9 and 10 to between the flange, tubes and the shaft. To an end of the tube 2 a bellows 11 is fixed by a screw. A protrusive round part of the bellows 11 is insertion fitted to a round hole of a slit holder 12, and the slit holder 12 is rotated for the bellows 11. A slit guide 13, spring 14 and a slit 15 are built in to the slit holder 12 in such a manner that the center of the slit is aligned to the center of the hole. The slit 15 is movably arranged only in the direction of width of the slit by the slit guide 13, and the operation of open-close of the slit can be performed by a wedge at the point end of the shaft 4.
JP12392379A 1979-09-28 1979-09-28 Accurate slit device Pending JPS5648054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12392379A JPS5648054A (en) 1979-09-28 1979-09-28 Accurate slit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12392379A JPS5648054A (en) 1979-09-28 1979-09-28 Accurate slit device

Publications (1)

Publication Number Publication Date
JPS5648054A true JPS5648054A (en) 1981-05-01

Family

ID=14872678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12392379A Pending JPS5648054A (en) 1979-09-28 1979-09-28 Accurate slit device

Country Status (1)

Country Link
JP (1) JPS5648054A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437637U (en) * 1987-08-27 1989-03-07
US5656775A (en) * 1993-10-22 1997-08-12 Bridgestone Corporation Device for installing a tire-wheel assembly onto a wheel balancer
CN101915613A (en) * 2010-08-02 2010-12-15 中国科学院长春光学精密机械与物理研究所 Slit adjusting device capable of adjusting slit width in double directions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437637U (en) * 1987-08-27 1989-03-07
US5656775A (en) * 1993-10-22 1997-08-12 Bridgestone Corporation Device for installing a tire-wheel assembly onto a wheel balancer
CN101915613A (en) * 2010-08-02 2010-12-15 中国科学院长春光学精密机械与物理研究所 Slit adjusting device capable of adjusting slit width in double directions

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