JPS531080A - Adjusting apparatus for ion beam of mass spectrometer - Google Patents

Adjusting apparatus for ion beam of mass spectrometer

Info

Publication number
JPS531080A
JPS531080A JP7430976A JP7430976A JPS531080A JP S531080 A JPS531080 A JP S531080A JP 7430976 A JP7430976 A JP 7430976A JP 7430976 A JP7430976 A JP 7430976A JP S531080 A JPS531080 A JP S531080A
Authority
JP
Japan
Prior art keywords
ion beam
mass spectrometer
adjusting apparatus
ion source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7430976A
Other languages
Japanese (ja)
Inventor
Yasuo Nakajima
Eiji Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7430976A priority Critical patent/JPS531080A/en
Publication of JPS531080A publication Critical patent/JPS531080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE: TO automatically restore position of ion beam with ion source deflecting electrode without complicated adjustment, and maintain constant performance of apparatus, by arranging independent two collectors between ion source and analyzing field, for detecting position of ion beam.
COPYRIGHT: (C)1978,JPO&Japio
JP7430976A 1976-06-25 1976-06-25 Adjusting apparatus for ion beam of mass spectrometer Pending JPS531080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7430976A JPS531080A (en) 1976-06-25 1976-06-25 Adjusting apparatus for ion beam of mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7430976A JPS531080A (en) 1976-06-25 1976-06-25 Adjusting apparatus for ion beam of mass spectrometer

Publications (1)

Publication Number Publication Date
JPS531080A true JPS531080A (en) 1978-01-07

Family

ID=13543388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7430976A Pending JPS531080A (en) 1976-06-25 1976-06-25 Adjusting apparatus for ion beam of mass spectrometer

Country Status (1)

Country Link
JP (1) JPS531080A (en)

Similar Documents

Publication Publication Date Title
JPS5439191A (en) Oxygen detector
JPS52117690A (en) Zeeman atomic absorption analysis and apparatus therefor
JPS531080A (en) Adjusting apparatus for ion beam of mass spectrometer
JPS5333689A (en) Composite ion source for mass spectrometer
JPS5249774A (en) Ion implanting device
JPS5313871A (en) Color purity detector for color brown tube
JPS5336291A (en) Mass spectrometer
JPS52136496A (en) Apparatus for ion beam machining
JPS52134492A (en) Ion source unit
JPS52150688A (en) Solid ion source
JPS5356087A (en) Emitter activating apparatus for fd
JPS51117569A (en) Sample drift correction device
JPS54865A (en) Molecular beam crystal growing method
JPS53121693A (en) Mass spectrometer
JPS5326192A (en) Compound analyzer
JPS5287086A (en) Total ion monitor apparatus for mass analyzer
JPS5364090A (en) Mass analyzer
JPS5220087A (en) Ion detecting device for mass spectrometer
JPS5225697A (en) Apparatus for varying of dispersion power in corpuscular beam optical systems
JPS52125266A (en) Cathode constant length welder unit in cathode ray tube
JPS52102089A (en) Ion source apparatus for mass spectrometer
JPS5284793A (en) Ion surce device of mass spectrometer
JPS52129275A (en) Impurity diffusion method
JPS53131893A (en) Ion source
JPS5415793A (en) Mass spectrograph of chromatography