JPS5225697A - Apparatus for varying of dispersion power in corpuscular beam optical systems - Google Patents
Apparatus for varying of dispersion power in corpuscular beam optical systemsInfo
- Publication number
- JPS5225697A JPS5225697A JP50100647A JP10064775A JPS5225697A JP S5225697 A JPS5225697 A JP S5225697A JP 50100647 A JP50100647 A JP 50100647A JP 10064775 A JP10064775 A JP 10064775A JP S5225697 A JPS5225697 A JP S5225697A
- Authority
- JP
- Japan
- Prior art keywords
- varying
- optical systems
- beam optical
- corpuscular beam
- dispersion power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: To perform adjustment of relative position of singular or plural condensing dispersing elements on the optical axis of corpuscular beam thereby putting the corpuscular optical system always in the best working condition depending upon operating conditions.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100647A JPS5225697A (en) | 1975-08-21 | 1975-08-21 | Apparatus for varying of dispersion power in corpuscular beam optical systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100647A JPS5225697A (en) | 1975-08-21 | 1975-08-21 | Apparatus for varying of dispersion power in corpuscular beam optical systems |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5225697A true JPS5225697A (en) | 1977-02-25 |
Family
ID=14279606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50100647A Pending JPS5225697A (en) | 1975-08-21 | 1975-08-21 | Apparatus for varying of dispersion power in corpuscular beam optical systems |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225697A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5517415B1 (en) * | 1971-07-16 | 1980-05-12 | ||
JPS55104060A (en) * | 1979-02-03 | 1980-08-09 | Hidetsugu Ikegami | Charged particle analyzer |
-
1975
- 1975-08-21 JP JP50100647A patent/JPS5225697A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5517415B1 (en) * | 1971-07-16 | 1980-05-12 | ||
JPS55104060A (en) * | 1979-02-03 | 1980-08-09 | Hidetsugu Ikegami | Charged particle analyzer |
JPH0121585B2 (en) * | 1979-02-03 | 1989-04-21 | Hidetsugu Ikegami |
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