JPS5225697A - Apparatus for varying of dispersion power in corpuscular beam optical systems - Google Patents

Apparatus for varying of dispersion power in corpuscular beam optical systems

Info

Publication number
JPS5225697A
JPS5225697A JP50100647A JP10064775A JPS5225697A JP S5225697 A JPS5225697 A JP S5225697A JP 50100647 A JP50100647 A JP 50100647A JP 10064775 A JP10064775 A JP 10064775A JP S5225697 A JPS5225697 A JP S5225697A
Authority
JP
Japan
Prior art keywords
varying
optical systems
beam optical
corpuscular beam
dispersion power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50100647A
Other languages
Japanese (ja)
Inventor
Hidetsugu Ikegami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Ikegami Hidetsugu
Original Assignee
Sumitomo Heavy Industries Ltd
Ikegami Hidetsugu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd, Ikegami Hidetsugu filed Critical Sumitomo Heavy Industries Ltd
Priority to JP50100647A priority Critical patent/JPS5225697A/en
Publication of JPS5225697A publication Critical patent/JPS5225697A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To perform adjustment of relative position of singular or plural condensing dispersing elements on the optical axis of corpuscular beam thereby putting the corpuscular optical system always in the best working condition depending upon operating conditions.
COPYRIGHT: (C)1977,JPO&Japio
JP50100647A 1975-08-21 1975-08-21 Apparatus for varying of dispersion power in corpuscular beam optical systems Pending JPS5225697A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50100647A JPS5225697A (en) 1975-08-21 1975-08-21 Apparatus for varying of dispersion power in corpuscular beam optical systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50100647A JPS5225697A (en) 1975-08-21 1975-08-21 Apparatus for varying of dispersion power in corpuscular beam optical systems

Publications (1)

Publication Number Publication Date
JPS5225697A true JPS5225697A (en) 1977-02-25

Family

ID=14279606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50100647A Pending JPS5225697A (en) 1975-08-21 1975-08-21 Apparatus for varying of dispersion power in corpuscular beam optical systems

Country Status (1)

Country Link
JP (1) JPS5225697A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517415B1 (en) * 1971-07-16 1980-05-12
JPS55104060A (en) * 1979-02-03 1980-08-09 Hidetsugu Ikegami Charged particle analyzer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517415B1 (en) * 1971-07-16 1980-05-12
JPS55104060A (en) * 1979-02-03 1980-08-09 Hidetsugu Ikegami Charged particle analyzer
JPH0121585B2 (en) * 1979-02-03 1989-04-21 Hidetsugu Ikegami

Similar Documents

Publication Publication Date Title
JPS5425747A (en) Zoom lens system
JPS51149479A (en) Process control device
JPS5225697A (en) Apparatus for varying of dispersion power in corpuscular beam optical systems
JPS5283619A (en) Alpha-substituted aminomethyl benzyl alcohol derivative
JPS52134931A (en) Air-to-fuel ratio feedback system
JPS53110197A (en) Laser machining system
JPS5322375A (en) Beam blanking device
JPS51137369A (en) Automatic shaft alignment unit for electron optics system
JPS525452A (en) Control process of reactive power readjusting system
JPS5321388A (en) Controlling system for unmanned car
JPS51129584A (en) An atmosphere type force increasing apparatus
JPS5263582A (en) Speed instruction circuit
JPS51141596A (en) Shelter guiding system
JPS51119154A (en) Floor heating system
JPS5396679A (en) Electron-beam drawing equipment
JPS5230321A (en) Television camera device
JPS51134039A (en) Monitor unit for communications control system
JPS51141597A (en) Shelter guiding system
JPS5410256A (en) Cutting torch holding
JPS5291144A (en) Load control apparatus for electric power system
JPS51147244A (en) Adjustment system of coder
JPS5315326A (en) N,n,n',n'-tetraglycidyltolylenediamine
JPS51111399A (en) Automatic tichet examination system
JPS51126692A (en) Side thruster
JPS52106515A (en) Electric car protection apparatus