JPS6412365B2 - - Google Patents
Info
- Publication number
- JPS6412365B2 JPS6412365B2 JP6406581A JP6406581A JPS6412365B2 JP S6412365 B2 JPS6412365 B2 JP S6412365B2 JP 6406581 A JP6406581 A JP 6406581A JP 6406581 A JP6406581 A JP 6406581A JP S6412365 B2 JPS6412365 B2 JP S6412365B2
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- light shielding
- light
- image
- pupil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 210000001747 pupil Anatomy 0.000 claims description 18
- 230000004907 flux Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000001000 micrograph Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/40—Optical focusing aids
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Automatic Focus Adjustment (AREA)
- Focusing (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6406581A JPS57179809A (en) | 1981-04-30 | 1981-04-30 | Focusing device for optical system |
| DE3215595A DE3215595C2 (de) | 1981-04-30 | 1982-04-27 | Fokussiereinrichtung |
| US06/372,374 US4521108A (en) | 1981-04-30 | 1982-04-27 | Focusing device for optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6406581A JPS57179809A (en) | 1981-04-30 | 1981-04-30 | Focusing device for optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57179809A JPS57179809A (en) | 1982-11-05 |
| JPS6412365B2 true JPS6412365B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-28 |
Family
ID=13247314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6406581A Granted JPS57179809A (en) | 1981-04-30 | 1981-04-30 | Focusing device for optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57179809A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4358872B2 (ja) * | 2007-03-19 | 2009-11-04 | アドバンスド・マスク・インスペクション・テクノロジー株式会社 | 高さ検出装置 |
| JP2009189467A (ja) * | 2008-02-13 | 2009-08-27 | Topcon Corp | スリットランプ |
-
1981
- 1981-04-30 JP JP6406581A patent/JPS57179809A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57179809A (en) | 1982-11-05 |