JPS57179809A - Focusing device for optical system - Google Patents

Focusing device for optical system

Info

Publication number
JPS57179809A
JPS57179809A JP6406581A JP6406581A JPS57179809A JP S57179809 A JPS57179809 A JP S57179809A JP 6406581 A JP6406581 A JP 6406581A JP 6406581 A JP6406581 A JP 6406581A JP S57179809 A JPS57179809 A JP S57179809A
Authority
JP
Japan
Prior art keywords
pupil
change
image
changes
douser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6406581A
Other languages
English (en)
Other versions
JPS6412365B2 (ja
Inventor
Yoshiaki Horikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP6406581A priority Critical patent/JPS57179809A/ja
Priority to DE3215595A priority patent/DE3215595C2/de
Priority to US06/372,374 priority patent/US4521108A/en
Publication of JPS57179809A publication Critical patent/JPS57179809A/ja
Publication of JPS6412365B2 publication Critical patent/JPS6412365B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
JP6406581A 1981-04-30 1981-04-30 Focusing device for optical system Granted JPS57179809A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6406581A JPS57179809A (en) 1981-04-30 1981-04-30 Focusing device for optical system
DE3215595A DE3215595C2 (de) 1981-04-30 1982-04-27 Fokussiereinrichtung
US06/372,374 US4521108A (en) 1981-04-30 1982-04-27 Focusing device for optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6406581A JPS57179809A (en) 1981-04-30 1981-04-30 Focusing device for optical system

Publications (2)

Publication Number Publication Date
JPS57179809A true JPS57179809A (en) 1982-11-05
JPS6412365B2 JPS6412365B2 (ja) 1989-02-28

Family

ID=13247314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6406581A Granted JPS57179809A (en) 1981-04-30 1981-04-30 Focusing device for optical system

Country Status (1)

Country Link
JP (1) JPS57179809A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008233342A (ja) * 2007-03-19 2008-10-02 Advanced Mask Inspection Technology Kk 高さ検出装置
JP2009189467A (ja) * 2008-02-13 2009-08-27 Topcon Corp スリットランプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008233342A (ja) * 2007-03-19 2008-10-02 Advanced Mask Inspection Technology Kk 高さ検出装置
JP2009189467A (ja) * 2008-02-13 2009-08-27 Topcon Corp スリットランプ

Also Published As

Publication number Publication date
JPS6412365B2 (ja) 1989-02-28

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