JPS6412239A - Temperature compensator for pressure sensor - Google Patents

Temperature compensator for pressure sensor

Info

Publication number
JPS6412239A
JPS6412239A JP16846387A JP16846387A JPS6412239A JP S6412239 A JPS6412239 A JP S6412239A JP 16846387 A JP16846387 A JP 16846387A JP 16846387 A JP16846387 A JP 16846387A JP S6412239 A JPS6412239 A JP S6412239A
Authority
JP
Japan
Prior art keywords
pressure
temperature
pressure sensor
cpu
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16846387A
Other languages
Japanese (ja)
Inventor
Shigetaka Takada
Yukihiro Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisan Industry Co Ltd
Original Assignee
Aisan Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisan Industry Co Ltd filed Critical Aisan Industry Co Ltd
Priority to JP16846387A priority Critical patent/JPS6412239A/en
Publication of JPS6412239A publication Critical patent/JPS6412239A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To achieve a reduction in cost with the saving of a temperature compensation circuit within a pressure sensor, by correcting an output of the pressure sensor by a temperature correction factor therefor read out of a memory circuit on the basis of an output from a temperature sensor. CONSTITUTION:When a suction tube pressure is introduced into a pressure introduction port 1, a semiconductor diaphragm of a pressure sensor 5 is distorted and a voltage is generated across a bridge circuit of a pressure detection gauge. The voltage is inputted into a CPU 16 via an amplifier and an A/D converter 14 to be read into a register. On the other hand, a signal from a temperature sensor 7 is read into the CPU 16 via the A/D converter 14. The CPU 16 reads out a temperature correction factor for the pressure sensor 5 from a temperature data through a memory circuit 15 to perform a temperature correction for a pressure data.
JP16846387A 1987-07-06 1987-07-06 Temperature compensator for pressure sensor Pending JPS6412239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16846387A JPS6412239A (en) 1987-07-06 1987-07-06 Temperature compensator for pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16846387A JPS6412239A (en) 1987-07-06 1987-07-06 Temperature compensator for pressure sensor

Publications (1)

Publication Number Publication Date
JPS6412239A true JPS6412239A (en) 1989-01-17

Family

ID=15868578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16846387A Pending JPS6412239A (en) 1987-07-06 1987-07-06 Temperature compensator for pressure sensor

Country Status (1)

Country Link
JP (1) JPS6412239A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08128826A (en) * 1994-11-01 1996-05-21 Asahi Optical Co Ltd Laser surveying instrument
US6218717B1 (en) 1998-01-16 2001-04-17 Denso Corporation Semiconductor pressure sensor and manufacturing method therefof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08128826A (en) * 1994-11-01 1996-05-21 Asahi Optical Co Ltd Laser surveying instrument
US6218717B1 (en) 1998-01-16 2001-04-17 Denso Corporation Semiconductor pressure sensor and manufacturing method therefof

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