JPS6088247U - pressure sensor - Google Patents
pressure sensorInfo
- Publication number
- JPS6088247U JPS6088247U JP18123583U JP18123583U JPS6088247U JP S6088247 U JPS6088247 U JP S6088247U JP 18123583 U JP18123583 U JP 18123583U JP 18123583 U JP18123583 U JP 18123583U JP S6088247 U JPS6088247 U JP S6088247U
- Authority
- JP
- Japan
- Prior art keywords
- comparison
- diaphragm
- measurement
- capacitance electrode
- span
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来より一般に使用されている従来例の構成説
明図で、Ａは正面図、Ｂは平面図、第２図は本考案の一
実施例の構成説明図で、Ａは正面図、Ｂは平面図、第３
図は第２図の動作説明図である。
゛ １・・・・・・本体ボデー、２・・・・・・測定室
、３・曲・導入口、４・・・・・・基準室、５・・・・
・・導入口、６エ・・測定ダイアフラム、７・・・・・
・移動電極、８・・・・・・測定電極、９・・・・・・
比較電極、１０・・・・・・比較室、１１・・曲溝入口
、１２・・・・・・比較ダイアフラム、１３・・曲移動
電極、１４・・・・・・スパン室、１５・・曲溝入口、
１６・・・・・°子パンダイアフラム、１７・・・・・
・移動電極、１８・・・・・・スパン固定電極、１９・
・・・・・固定容量、２ｏ・・・・・・ＩＣ演算部。FIG. 1 is an explanatory view of the configuration of a conventional example that has been commonly used, A is a front view, B is a plan view, and FIG. 2 is an explanatory view of the configuration of an embodiment of the present invention, A is a front view, B is a plan view, 3rd
The figure is an explanatory diagram of the operation of FIG. 2.゛ 1...Main body, 2...Measurement chamber, 3.Song/inlet, 4...Reference chamber, 5...
...Inlet, 6D...Measuring diaphragm, 7...
・Moving electrode, 8... Measuring electrode, 9...
Comparison electrode, 10... Comparison chamber, 11... Curved groove entrance, 12... Comparison diaphragm, 13... Curved moving electrode, 14... Span chamber, 15... curved groove entrance,
16...°Baby pan diaphragm, 17...
・Moving electrode, 18...Span fixed electrode, 19.
...Fixed capacity, 2o...IC calculation section.
Claims (1)
設けられ一面側に測定流体が導入される室と他面側に基
準流体が導入される室が設けられた測定ダイアフラムと
、該測定ダイアフラムに対向して前記室に設けられ該測
定ダイアフラムを移動電極として測定静電容量電極を構
成する測定固定容量電極と、前記本体ボデーに設けられ
両面に測定流体が導入される比較室が設けられた比較ダ
イアフラムと、該比較ダイアフラムに対向して前記比較
室に設けられ該比較ダイアフラムを移動電極として比較
静電容量電極を構成する比較固定容量電極と、前記本体
ボデーに設けられ両面に測定流体が導入される長パン室
が設けられたスパンダイアフラムと、該スパンダイアフ
ラムに対向して前記スパン室に設けられ該スパンダイア
フラムを移動電極としてスパン静電容量電極を構成する
スパン固定容量電極とを具備し、測定静電容量電極と比
較静電容量電極の初期ギャップを等しくし、スパン静電
容量電極の初期ギャップは測定静電容量電極の初期ギャ
ップに測定ダイアフラムの最大変位量を加えたものとし
、測定静電容量ＣＭｅＭ比較静電容をＣＲｅ％スパン静
電容量をＣ３ｐａｎ％浮遊容量をＣｓとすると、測定出
力電圧Ｖは１ ｍｃｃ−ｃ Ｖ＝−一−−−−−−−−−−−−−−−−一−−−−
−−−１ Ｃ−ＣＣ−Ｃ ８ｐａ１ ３ Ｒｅ ８なる式に
より求まるようにしてなる圧力センサ。[Claims for Utility Model Registration] A fixed capacitance electrode provided on the main body, a chamber provided on the main body into which a measuring fluid is introduced on one side, and a chamber into which a reference fluid is introduced on the other side. a measurement diaphragm, a measurement fixed capacitance electrode provided in the chamber opposite to the measurement diaphragm and constituting a measurement capacitance electrode with the measurement diaphragm as a moving electrode, and a measurement fixed capacitance electrode provided on the main body and into which a measurement fluid is introduced on both sides. a comparison diaphragm provided with a comparison chamber, a comparison fixed capacitance electrode provided in the comparison chamber opposite the comparison diaphragm and constituting a comparison capacitance electrode with the comparison diaphragm as a moving electrode; and a comparison fixed capacitance electrode provided in the main body. a span diaphragm provided with long bread chambers into which a fluid to be measured is introduced on both sides; and a fixed span that is provided in the span chamber opposite to the span diaphragm and constitutes a span capacitance electrode with the span diaphragm as a moving electrode. The initial gap of the measurement capacitance electrode and the comparison capacitance electrode are made equal, and the initial gap of the span capacitance electrode is equal to the maximum displacement of the measurement diaphragm to the initial gap of the measurement capacitance electrode. If the measured capacitance is CMeM, the comparison capacitance is CRe%, the span capacitance is C3, and the stray capacitance is Cs, then the measured output voltage V is 1 mcc-c V=-1. −−−−−−−−−1−−−−
---1 A pressure sensor determined by the formula: C-CC-C 8pa1 3 Re 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18123583U JPS6088247U (en) | 1983-11-24 | 1983-11-24 | pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18123583U JPS6088247U (en) | 1983-11-24 | 1983-11-24 | pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6088247U true JPS6088247U (en) | 1985-06-17 |
| JPH0138509Y2 JPH0138509Y2 (en) | 1989-11-17 |
Family
ID=30392772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18123583U Granted JPS6088247U (en) | 1983-11-24 | 1983-11-24 | pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6088247U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006071501A (en) * | 2004-09-02 | 2006-03-16 | Canon Anelva Technix Corp | Capacitive pressure sensor |
| JP2013533974A (en) * | 2010-07-01 | 2013-08-29 | エム ケー エス インストルメンツ インコーポレーテッド | Capacitance sensor improvements |
-
1983
- 1983-11-24 JP JP18123583U patent/JPS6088247U/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006071501A (en) * | 2004-09-02 | 2006-03-16 | Canon Anelva Technix Corp | Capacitive pressure sensor |
| JP4542397B2 (en) * | 2004-09-02 | 2010-09-15 | キヤノンアネルバ株式会社 | Manufacturing method of capacitive pressure sensor |
| JP2013533974A (en) * | 2010-07-01 | 2013-08-29 | エム ケー エス インストルメンツ インコーポレーテッド | Capacitance sensor improvements |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0138509Y2 (en) | 1989-11-17 |
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