JPS6412093B2 - - Google Patents
Info
- Publication number
- JPS6412093B2 JPS6412093B2 JP59208259A JP20825984A JPS6412093B2 JP S6412093 B2 JPS6412093 B2 JP S6412093B2 JP 59208259 A JP59208259 A JP 59208259A JP 20825984 A JP20825984 A JP 20825984A JP S6412093 B2 JPS6412093 B2 JP S6412093B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- light beam
- sample
- image
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 22
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 12
- 230000008859 change Effects 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000004069 differentiation Effects 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Light Receiving Elements (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59208259A JPS60100448A (ja) | 1984-10-05 | 1984-10-05 | 光応答信号利用走査像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59208259A JPS60100448A (ja) | 1984-10-05 | 1984-10-05 | 光応答信号利用走査像形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60100448A JPS60100448A (ja) | 1985-06-04 |
| JPS6412093B2 true JPS6412093B2 (enrdf_load_stackoverflow) | 1989-02-28 |
Family
ID=16553273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59208259A Granted JPS60100448A (ja) | 1984-10-05 | 1984-10-05 | 光応答信号利用走査像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60100448A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07278924A (ja) * | 1994-04-12 | 1995-10-24 | Dia Gomme Kk | 作業用手袋及びその製造方法 |
-
1984
- 1984-10-05 JP JP59208259A patent/JPS60100448A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60100448A (ja) | 1985-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0225969B1 (en) | Apparatus and method for controlling irradiation of electron beam at fixed position in electron beam tester system | |
| US4600839A (en) | Small-dimension measurement system by scanning electron beam | |
| US4670652A (en) | Charged particle beam microprobe apparatus | |
| EP0050475B1 (en) | Scanning-image forming apparatus using photo electric signal | |
| JP2754096B2 (ja) | 電子線による試料表面の状態測定装置 | |
| KR960012331B1 (ko) | 시료표면 분석에 있어서 백그라운드 보정을 위한 방법 및 장치 | |
| GB2230602A (en) | Photo-counting type streak camera | |
| JPS6412093B2 (enrdf_load_stackoverflow) | ||
| JP2001084946A (ja) | 二次粒子検出器系の評価方法および粒子線装置 | |
| JP3420037B2 (ja) | 寸法測定装置及び寸法測定方法 | |
| JPS61135034A (ja) | 走査電子顕微鏡等における画像表示方式 | |
| US6995369B1 (en) | Scanning electron beam apparatus and methods of processing data from same | |
| JPS5853504B2 (ja) | 集積回路装置の試験方法 | |
| JPH06103950A (ja) | 走査電子顕微鏡における立体像取得方法 | |
| JP2000133193A (ja) | 荷電粒子線照射装置 | |
| JPS5912553A (ja) | 電子線装置 | |
| JPH01286244A (ja) | 走査振動を補正する電子ビーム装置 | |
| JPH0696711A (ja) | 走査電子顕微鏡像の表示方法 | |
| KR840000875B1 (ko) | 주사(走査) 전자현미경 | |
| JP3153262B2 (ja) | 走査電子顕微鏡 | |
| JPS59217934A (ja) | 走査電子顕微鏡の二次電子信号検出装置 | |
| JPS61176810A (ja) | 寸法計測装置 | |
| JPS6055250A (ja) | ルミネッセンス検出装置 | |
| JPS597270A (ja) | 電子ビ−ムを用いた試料電位測定装置 | |
| JPS63102148A (ja) | 電子線装置 |