JPS6411347B2 - - Google Patents

Info

Publication number
JPS6411347B2
JPS6411347B2 JP15780A JP15780A JPS6411347B2 JP S6411347 B2 JPS6411347 B2 JP S6411347B2 JP 15780 A JP15780 A JP 15780A JP 15780 A JP15780 A JP 15780A JP S6411347 B2 JPS6411347 B2 JP S6411347B2
Authority
JP
Japan
Prior art keywords
vacuum atmosphere
vacuum
fine particles
electron emitting
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56111058A (en
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP15780A priority Critical patent/JPS56111058A/ja
Publication of JPS56111058A publication Critical patent/JPS56111058A/ja
Publication of JPS6411347B2 publication Critical patent/JPS6411347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrostatic Separation (AREA)
JP15780A 1980-01-07 1980-01-07 Vacuum purification device Granted JPS56111058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15780A JPS56111058A (en) 1980-01-07 1980-01-07 Vacuum purification device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15780A JPS56111058A (en) 1980-01-07 1980-01-07 Vacuum purification device

Publications (2)

Publication Number Publication Date
JPS56111058A JPS56111058A (en) 1981-09-02
JPS6411347B2 true JPS6411347B2 (enrdf_load_stackoverflow) 1989-02-23

Family

ID=11466199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15780A Granted JPS56111058A (en) 1980-01-07 1980-01-07 Vacuum purification device

Country Status (1)

Country Link
JP (1) JPS56111058A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185465A (ja) * 1987-01-28 1988-08-01 Matsushita Electric Ind Co Ltd 集塵装置
JPH0243962A (ja) * 1988-08-01 1990-02-14 Anelva Corp 真空処理装置の集塵装置
JPH0744672U (ja) * 1995-05-08 1995-11-28 日電アネルバ株式会社 真空処理装置の集塵装置
KR101008065B1 (ko) 2008-09-08 2011-01-13 고병모 복사압을 이용한 진공펌프

Also Published As

Publication number Publication date
JPS56111058A (en) 1981-09-02

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