JPS56111058A - Vacuum purification device - Google Patents
Vacuum purification deviceInfo
- Publication number
- JPS56111058A JPS56111058A JP15780A JP15780A JPS56111058A JP S56111058 A JPS56111058 A JP S56111058A JP 15780 A JP15780 A JP 15780A JP 15780 A JP15780 A JP 15780A JP S56111058 A JPS56111058 A JP S56111058A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum atmosphere
- positive electrode
- fine particles
- electrode part
- electron radiating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrostatic Separation (AREA)
Abstract
PURPOSE: To purify the inside of a vacuum atmosphere by charging the fine particles suspending in said atmosphere by irradiating photoelectrons from an electron radiating part and sucking these fine particles in a positive electrode part having positive potential.
CONSTITUTION: An electron radiating part 3 and a positive electrode part 4 are diametrally disposed in a manner as to sandwich the space in a housing 1 in a vacuum atmosphere. Here, when photoelectrons are radiated from the photoelectric surface of the electron radiating part 3, the fine partiles, such as carbon, oil mist, metal particles and the like, suspending or scattering in the vacuum atmosphere are charged. These charged fine particles are sucked to the positive electrode part 4 having positive potential, and are thereby captured. As a result, the purification of the inside of the vacuum atmosphere is effected.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56111058A true JPS56111058A (en) | 1981-09-02 |
JPS6411347B2 JPS6411347B2 (en) | 1989-02-23 |
Family
ID=11466199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15780A Granted JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56111058A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63185465A (en) * | 1987-01-28 | 1988-08-01 | Matsushita Electric Ind Co Ltd | Dust collector |
JPH0243962A (en) * | 1988-08-01 | 1990-02-14 | Anelva Corp | Dust collector for vacuum treatment device |
JPH0744672U (en) * | 1995-05-08 | 1995-11-28 | 日電アネルバ株式会社 | Vacuum processing equipment dust collector |
KR101008065B1 (en) | 2008-09-08 | 2011-01-13 | 고병모 | Radiaton pressure vacuum pump |
-
1980
- 1980-01-07 JP JP15780A patent/JPS56111058A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63185465A (en) * | 1987-01-28 | 1988-08-01 | Matsushita Electric Ind Co Ltd | Dust collector |
JPH0243962A (en) * | 1988-08-01 | 1990-02-14 | Anelva Corp | Dust collector for vacuum treatment device |
JPH0744672U (en) * | 1995-05-08 | 1995-11-28 | 日電アネルバ株式会社 | Vacuum processing equipment dust collector |
KR101008065B1 (en) | 2008-09-08 | 2011-01-13 | 고병모 | Radiaton pressure vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
JPS6411347B2 (en) | 1989-02-23 |
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