JPS6411347B2 - - Google Patents
Info
- Publication number
- JPS6411347B2 JPS6411347B2 JP15780A JP15780A JPS6411347B2 JP S6411347 B2 JPS6411347 B2 JP S6411347B2 JP 15780 A JP15780 A JP 15780A JP 15780 A JP15780 A JP 15780A JP S6411347 B2 JPS6411347 B2 JP S6411347B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum atmosphere
- vacuum
- fine particles
- electron emitting
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 6
- 238000000746 purification Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 3
- 108010083687 Ion Pumps Proteins 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrostatic Separation (AREA)
Description
【発明の詳細な説明】
本発明は真空雰囲気内で浮遊する微粒子を除去
して雰囲気内の清浄化を図り得る真空浄化装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum purification device capable of removing particulates floating in a vacuum atmosphere to purify the atmosphere.
一般に真空雰囲気を現出せしめるポンプとして
ロータリーポンプ、デイフユージヨンポンプ、モ
リキユラーターボポンプ、イオンポンプ、クライ
オポンプ等がある。しかしながら、ロータリーポ
ンプでは、油の後拡散（バツクデイフユージヨ
ン）が生じて現出した真空雰囲気を汚染し、真空
度も高く保てないという欠点がある。また、デイ
フユージヨンポンプも油の後拡散があり、真空雰
囲気を汚染する欠点がある。更にモリキユラータ
ーボポンプ、イオンポンプ、クライオポンプ等は
機械的或は物理的に真空度を上げる機能は有する
が、目的とする真空雰囲気内の微粒子の除去まで
はその機能はない。 Generally, there are rotary pumps, diffusion pumps, molecular turbo pumps, ion pumps, cryopumps, etc. as pumps that create a vacuum atmosphere. However, rotary pumps have the disadvantage that back diffusion of oil occurs and contaminates the vacuum atmosphere that appears, and that a high degree of vacuum cannot be maintained. Diffusion pumps also have the disadvantage of causing oil to diffuse and contaminate the vacuum atmosphere. Further, although a molecular turbo pump, an ion pump, a cryopump, etc. have the function of mechanically or physically increasing the degree of vacuum, they do not have the function of removing the target particulates in the vacuum atmosphere.
このように、真空雰囲気内に微粒子が存在する
と、例えばＸ線発生装置において、ターゲツト材
料から発生するターゲツト材（Ｃ，Al，Si，Mo
等）の蒸発粒子がＸ線窓に付着し、Ｘ線透過率の
低下を招いてＸ線強度を低下させるという問題が
生じる。また、蒸着処理時などに、他の物質の微
粒子が試料表面に付着して蒸着膜に欠陥を生ずる
おそれもある。 In this way, if fine particles exist in a vacuum atmosphere, they will cause the target material (C, Al, Si, Mo
A problem arises in that evaporated particles of (e.g.) adhere to the X-ray window, resulting in a decrease in X-ray transmittance and a decrease in X-ray intensity. Furthermore, during vapor deposition, fine particles of other substances may adhere to the sample surface and cause defects in the vapor deposited film.
したがつて、本発明は真空雰囲気内に存在する
微粒子を除去して清浄な雰囲気を確保することが
できる真空浄化装置を提供することを目的として
いる。 Accordingly, an object of the present invention is to provide a vacuum purification device that can remove particulates existing in a vacuum atmosphere and ensure a clean atmosphere.
本発明は、真空雰囲気内で浮遊する微粒子に電
子を付与してこれを帯電させる電子放射部と、こ
の帯電した微粒子を吸引捕獲する正電極部とから
構成することを特徴とする。 The present invention is characterized in that it is comprised of an electron emitting section that charges particles by imparting electrons to them floating in a vacuum atmosphere, and a positive electrode section that attracts and captures the charged particles.
以下、図面に示す本発明の実施例を説明する。 Embodiments of the present invention shown in the drawings will be described below.
図において、１は内部を真空雰囲気に保ち得る
ハウジングで、このハウジング１内の空間２を挾
むように電子放射部３と、正電極部４とを正対配
置している。電子放射部３は、石英基板５表面に
Tiメツシユ６を形成し、更にCs層７にて表面を
覆つて光電面を構成している。そして、これら電
子放射部３と正電極部４との間には電源８を接続
しており、また電子放射部３の裏面には光源９を
配置している。１０，１０はシール部材である。 In the figure, reference numeral 1 denotes a housing capable of maintaining a vacuum atmosphere inside, and an electron emitting section 3 and a positive electrode section 4 are disposed directly opposite each other so as to sandwich a space 2 in the housing 1. The electron emitting part 3 is on the surface of the quartz substrate 5.
A Ti mesh 6 is formed, and the surface is further covered with a Cs layer 7 to constitute a photocathode. A power source 8 is connected between the electron emitting section 3 and the positive electrode section 4, and a light source 9 is arranged on the back surface of the electron emitting section 3. 10, 10 are sealing members.
したがつて、今真空雰囲気内に炭素、油滴、金
属粒その他の微粒子が浮遊或は飛翔しているもの
とすると、電子放射部３の光電面から光電子が放
射され、この光電子が微粒子に当たることにより
微粒子を帯電させる。帯電した微粒子は正電位を
もつた正電極部４に吸引されかつ捕獲される。こ
の結果、真空雰囲気内の清浄化を図ることができ
る。 Therefore, if carbon, oil droplets, metal particles, or other fine particles are floating or flying in a vacuum atmosphere, photoelectrons will be emitted from the photocathode of the electron emitting section 3, and these photoelectrons will hit the fine particles. charges the fine particles. The charged fine particles are attracted and captured by the positive electrode section 4 having a positive potential. As a result, the vacuum atmosphere can be cleaned.
これにより、例えばＸ線発生装置では蒸発粒子
のＸ線窓への付着を防止してＸ線透過率の低下を
防止でき、また蒸着処理時における蒸着膜の欠陥
発生を防止することができる。 As a result, for example, in an X-ray generator, it is possible to prevent evaporated particles from adhering to an X-ray window, thereby preventing a decrease in X-ray transmittance, and also preventing the occurrence of defects in a deposited film during vapor deposition processing.
以上のように本発明によれば真空雰囲気内の微
粒子を確実に除去することができ、微粒子が原因
とされていた種々の不具合を解消することができ
るという効果を奏する。 As described above, according to the present invention, fine particles in a vacuum atmosphere can be reliably removed, and various problems caused by fine particles can be solved.
図は本発明装置の全体構成を示す断面図であ
る。
１……ハウジング、３……電子放射部、４……
正電極部、５……石英基板、６……Tiメツシユ、
７……Cs層、８……電源、９……光源。
The figure is a sectional view showing the overall configuration of the device of the present invention. 1...Housing, 3...Electron emission section, 4...
Positive electrode part, 5...quartz substrate, 6...Ti mesh,
7...Cs layer, 8...power supply, 9...light source.
Claims (1)
に電子を付与してこれを帯電させる電子放射部
と、この帯電した微粒子を吸引捕獲する正電極部
とを具備してなる真空浄化装置。1. A vacuum purification device comprising an electron emitting section that charges particles floating or flying in a vacuum atmosphere by adding electrons to them, and a positive electrode section that attracts and captures the charged particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56111058A JPS56111058A (en) | 1981-09-02 |
| JPS6411347B2 true JPS6411347B2 (en) | 1989-02-23 |
Family
ID=11466199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15780A Granted JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56111058A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185465A (en) * | 1987-01-28 | 1988-08-01 | Matsushita Electric Ind Co Ltd | Dust collector |
| JPH0243962A (en) * | 1988-08-01 | 1990-02-14 | Anelva Corp | Dust collector for vacuum treatment device |
| JPH0744672U (en) * | 1995-05-08 | 1995-11-28 | 日電アネルバ株式会社 | Vacuum processing equipment dust collector |
| KR101008065B1 (en) | 2008-09-08 | 2011-01-13 | 고병모 | Radiaton pressure vacuum pump |
-
1980
- 1980-01-07 JP JP15780A patent/JPS56111058A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56111058A (en) | 1981-09-02 |
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