JP4059086B2 - Photoelectron emission plate and negative particle generator using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a device for adding negative particles to air, and more particularly to a negative particle generator using photoelectrons generated by the photoelectric effect.
[0002]
[Prior art]
As a conventional negative particle generator, photoelectrons are generated by irradiating ultraviolet rays onto a photoelectron emitting material, and high-clean air from which fine particles are removed by a fan and a dust collecting filter enters the device, and a dust collecting filter, etc. In some cases, the fine particles that are not removed by the trapping process become negative particles by capturing photoelectrons, and are emitted from the apparatus and released into the air (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Publication No. 8-10616
[Problems to be solved by the invention]
However, the conventional configuration has a problem in that the generation of minus particles starting from the irradiation of ultraviolet rays onto the photoelectron emitting material decreases with time.
[0005]
The present invention solves the above-described conventional problems, and an object of the present invention is to provide a minus particle generator that does not reduce the amount of minus particles generated even if time passes.
[0006]
[Means for Solving the Problems]
In order to solve the above-described conventional problems, the negative particle generator of the present invention is a photoelectron in which a barrier film having a barrier property is provided on a substrate, and an emission film that emits photoelectrons by light irradiation is provided on the barrier film. Negative particles were generated using a discharge plate.
[0007]
The present inventors have found that the cause of the decrease in the number of negative particles is that a compound other than the photoelectron emitting material diffused through the pinhole of the photoelectron emitting material by light irradiation covers the surface of the photoelectron emitting material. As a result, by providing a film having a high barrier property under the photoelectron emitting material, the amount of minus particles generated does not decrease over time.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
The invention according to claim 1 is a photoelectron emission plate in which a barrier film having barrier properties and conductivity is provided on a substrate, and an emission film that emits photoelectrons by light irradiation is provided on the barrier film. The photoelectron emission plate is characterized in that the barrier film is electrically grounded and the film thickness of the emission film is thicker than the maximum surface roughness of the surface of the barrier film . Thus, barrier film, an inside release film that emits photoelectrons upon irradiation with light to prevent the base material from diffusing, that underlying material covering the release film surface in anti Gukoto, negative particle generation time As a result, the number of negative ions is not greatly reduced, that is, the photoelectron emission plate is excellent in durability over a long period.
[0009]
In addition, since the film thickness of the emission film is thicker than the maximum surface roughness of the surface of the barrier film, photoelectrons are emitted from all of the outermost surface of the photoelectron emission plate. It becomes a photoelectron emission plate that emits.
[0010]
In addition, the electrons on the photoelectron emission plate that are insufficient due to the generation of negative particles can be compensated for by electrically grounding the conductive barrier film. It becomes a photoelectron emission plate that emits.
[0011]
The invention described in claim 2 is characterized in that, in particular, the barrier film described in claim 1 is a nitride or carbide of each of Ti and Zr, ITO, tin oxide, or a composite thereof. Thereby, the barrier property of the barrier film is remarkably improved. Therefore, the photoelectron emission plate is excellent in durability and emits many negative particles for a longer period.
[0012]
The invention described in claim 3 is particularly characterized in that the substrate described in claim 1 or 2 has conductivity. Then, the photoelectron emission plate having a barrier and conductive film on the conductive substrate and a film that emits photoelectrons by irradiating light directly on the conductive film allows the electrons of the insufficient photoelectron emission plate to be transferred to the barrier and conductive layer. The conductive substrate can be compensated by being electrically grounded through the barrier film having the property , and therefore, it becomes a photoelectron emission plate that is excellent in durability and emits many negative particles over a long period of time.
[0013]
The invention described in claim 4 is particularly characterized in that the substrate described in claim 3 is stainless steel. As a result, the surface diffusion of the stainless metal component due to light irradiation is blocked by the dense surface oxide film of stainless steel, so that the photoelectron emission plate is excellent in durability and emits many negative particles over a long period of time.
[0014]
The invention according to claim 5 comprises the photoelectron emission plate according to any one of claims 1 to 4 and a light source for irradiating light to the emission film of the photoelectron emission plate, and the surface of the photoelectron emission plate The negative particle generator is characterized in that negative particles are generated by flowing oxygen into the apparatus. As a result, more negative oxygen particles can be supplied and the negative ion number is not greatly reduced, that is, a negative particle generator excellent in durability over a long period of time.
[0015]
In addition, for example, when oxygen minus particles are used in an air purifier, a relaxing effect is maintained in the space, and when used in a refrigerator, food oxidation and moisture retention effects are maintained. You can also do it.
[0016]
In addition to the above, ceramic films and their composite compounds are effective as the barrier film.
[0017]
In addition to the above, as a substrate, a metal or an alloy such as aluminum is effective as a substrate having conductivity. Also, it does not have to be conductive, and glass, plastic, etc. are effective. By providing a film having barrier properties and conductivity and electrically grounding it, many negative particles are generated. can do.
[0018]
As the conductive film having a barrier property, the above-mentioned other conductive ceramics or their composite compounds are effective.
[0019]
In addition, a metal or a conductive ceramic is effective as a film that emits photoelectrons when irradiated with light.
[0020]
【Example】
(Reference Example 1)
Hereinafter, the negative ion generator of Reference Example 1 will be described with reference to FIG. 1 is a photoelectron emission plate, 2 is a lamp (light source) for irradiating light to 1, and the photoelectron emission plate 1 is grounded to the upper and lower walls of the ventilation opening so as to sandwich the lamp 2 therebetween. A fan is installed behind the vent to send air to the vent. Further, unless otherwise specified, a ground wire 3 that is electrically grounded is provided on the substrate side of the photoelectron emission plate 1.
[0021]
The lamp 2 was a 6 W cold cathode tube, and the air blowing rate was 200 L / min. All switches were turned on unless otherwise specified.
[0022]
As a photoelectron emission plate of Reference Example 1 , 1 μm of silica is provided on an acrylic substrate by sputtering, and 1 μm of gold is vapor-deposited thereon to produce a photoelectron emission plate 1A, which is mounted on the negative ion generator of FIG. The number of negative particles with respect to time was measured. Electrical grounding was performed with a gold film.
[0023]
Further, as a comparative photoelectron emission plate for comparison with the photoelectron emission plate 1A of Reference Example 1 , 1 μm of gold is vapor-deposited on an acrylic substrate to produce the photoelectron emission plate 1B, which is mounted on the negative ion generator of FIG. The number of negative particles with respect to the operating time was measured. Electrical grounding was performed with a gold film.
[0024]
FIG. 2 shows the number of negative particles with respect to the operating time of the photoelectron emission plates 1A and 1B. Towards the light emission plate 1A having barrier property, mow Kotogawa that maintain the number of negative particles over time.
[0025]
Example 1
Next, as the photoelectron emission plate of Example 1 , 1 μm of titanium nitride was vapor-deposited on an acrylic substrate, and 1 μm of gold was vapor-deposited thereon to produce a photoelectron emission plate 2A, which was mounted on the negative ion generator of FIG. The number of negative particles with respect to the operating time was measured. Electrical grounding was performed with titanium nitride.
[0026]
Further, as a comparative photoelectron emission plate for comparison with the photoelectron emission plate 2A of the present embodiment, 1 μm of silica is provided on an acrylic substrate by sputtering, and 1 μm of gold is vapor-deposited thereon to produce a photoelectron emission plate 2B. The negative ion generator of FIG. 1 was mounted, and the number of negative particles with respect to the operating time was measured. Electrical grounding was performed with silica.
[0027]
FIG. 3 shows the number of negative particles with respect to the operation time of the photoelectron emission plates 2A and 2B. It can be seen that the photoelectron emission plate 2A having the conductive film as the base emits and maintains a larger number of negative particles over a long period of time, and it can be seen that the photoelectron emission plate 2A exhibits the effect of the present invention.
[0028]
(Example 2)
Next, as a photoelectron emission plate of Example 2 , 1 μm of titanium nitride was vapor-deposited on a brass substrate, further 1 μm of gold was vapor-deposited thereon, and photoelectron emission plate 3A was vapor-deposited with 1 μm of titanium nitride on a stainless steel substrate. 1 μm of gold was vapor-deposited thereon to produce a photoelectron emission plate 3B, which was mounted on the negative ion generator of FIG. 1, and the number of negative particles with respect to the operating time was measured.
[0029]
Further, as a comparative photoelectron emission plate for comparison with the photoelectron emission plate 3A of the present embodiment, 1 μm of titanium nitride is vapor-deposited on acrylic, and further 1 μm of gold is vapor-deposited thereon to produce a photoelectron emission plate 3C. The negative ion generator of FIG. 1 was mounted and the number of negative particles with respect to the operating time was measured.
[0030]
FIG. 3 shows the number of negative particles with respect to the operating time of the photoelectron emission plates 3A, 3B, and 3C. It can be seen that the photoelectron emission plates 3A and 3B in the case where the substrate is conductive emits a larger number of negative particles, and that 3B is maintained for a long time. The photoelectron emission plates 3A and 3B are the present invention. It turns out that the effect of is demonstrated.
[0031]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a photoelectron emission plate in which the amount of minus particles generated does not decrease over time and a minus particle generator using the same.
[Brief description of the drawings]
FIG. 1 is an external configuration diagram of a negative ion generator in Reference Example 1. FIG. 2 is a diagram showing the number of negative particles generated with respect to operating time in the photoelectron emission plate of the reference example. FIG. 3 is a photoelectron in Example 1 of the present invention. FIG. 4 is a diagram showing the number of negative particles generated with respect to the operating time of the emission plate. FIG. 4 is a diagram showing the number of negative particles generated with respect to the operating time of the photoelectron emitting plate in Example 2 of the present invention.
1 Photoelectron emission plate 2 Lamp (light source)
3 Ground wire

Claims (5)

A photoelectron emission plate in which a barrier film having a barrier property and conductivity is provided on a substrate, and an emission film that emits photoelectrons by light irradiation is provided on the barrier film, the barrier film being electrically grounded A photoelectron emission plate, wherein the emission film is thicker than the maximum surface roughness of the surface of the barrier film .   The photoelectron emission plate according to claim 1, wherein the barrier film is a nitride or carbide of Ti or Zr, ITO, tin oxide, or a composite thereof. The photoelectron emission plate according to claim 1 or 2, wherein the substrate has conductivity . The photoelectron emission plate according to claim 3, wherein the substrate is made of stainless steel . A negative particle comprising: the photoelectron emission plate according to any one of claims 1 to 4; and a light source for irradiating light to an emission film of the photoelectron emission plate, and flowing oxygen to the surface of the photoelectron emission plate. The negative particle generator characterized by generating.

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