KR100984900B1 - Photoelectron generating plate, and negative particle generating device using such plate - Google Patents

Abstract

In the photoelectron emission plate and the negative particle generator using the same, it is assumed that the generation of negative particles is maintained for a long time.

It was set as the structure which has the emission film which emit | releases a photoelectron by having a barrier property on the board | substrate, and irradiating light on the board | substrate. Thereby, the base material which spread | dispersed the emission film which discharge | releases a photoelectron by light irradiation can prevent that the base material coat | covers the emission film surface, and has a barrier property, and that the number of negative ions does not greatly decrease according to minus particle generation time, ie The photoelectron emission plate 1 excellent in durability over a long period of time and a negative particle generator using the same can be realized.

Emission plate, barrier property, negative particle, substrate, optoelectronic, antistatic device

Description

Photoelectron emission plate and negative particle generator using the same {PHOTOELECTRON GENERATING PLATE, AND NEGATIVE PARTICLE GENERATING DEVICE USING SUCH PLATE}

1 is an external configuration diagram of a negative ion generating device according to a first embodiment of the present invention;

FIG. 2 is a diagram showing the number of negative particle generations with respect to the operation time in the photoelectron emission plate of Example 1; FIG.

3 is a diagram showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the second embodiment of the present invention;

4 is a diagram showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the third embodiment of the present invention;

Fig. 5 is a diagram showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the fourth embodiment of the present invention.

6 is another diagram showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the fourth embodiment of the present invention;

7 is a diagram showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the fifth embodiment of the present invention;

8 is a conceptual diagram showing a photoelectron generating mechanism in the case where an ultraviolet lamp is used in Example 1 of the present invention;

Fig. 9 is a chart showing the number of negative particle generations with respect to the operating time of the photoelectron emission plate according to the sixth embodiment of the present invention;

Fig. 10 is a diagram showing the number of negative particle generations with respect to the operation time of the photoelectron emission plate according to the seventh embodiment of the present invention;

Fig. 11 is a chart showing the number of negative particle generations with respect to the operation time of the photoelectron emission plate according to the eighth embodiment of the present invention.

12 is a sectional view showing the principal parts of the structure of a negative particle generator in Example 9 of the present invention;

13 is a graph showing a comparison with the conventional one in the amount of negative particle generation in Example 9;

14 is a sectional view showing the principal parts of the structure of the negative particle generator in Example 10 of the present invention;

15 is a graph showing the amount of negative particle generation in Example 10,

Fig. 16 is a sectional view showing the principal parts of the structure of a negative particle generator in Example 11 of the present invention;

17 is a graph showing the amount of negative particle generation in Example 11,

18 is a sectional view showing the main parts of a conventional negative particle generating device;                 

19 is a structural diagram of a charge removing device according to a twelfth embodiment of the present invention;

20 is a view showing the relationship between the operating time of the antistatic apparatus 9A, 9B, 9C and the number of generated negative particles in Example 12 of the present invention;

21 is a structural diagram of an electric vacuum cleaner in which an antistatic device according to a fourth embodiment of the twelfth embodiment is mounted on a suction nozzle;

Fig. 22 is a structural diagram of the vacuum cleaner mounted on the dust collecting part of the main body, in the antistatic device according to the fifth embodiment of the twelfth embodiment;

Explanation of symbols for the main parts of the drawings

1, 32: photoelectric emission plate 2: lamp (light source)

3, 34: earth wire 4, 11: mesh-shaped photoelectron generating material

5: light source 6: air inlet

7: air outlet 8: electrical ground

9: container 12: mesh-shaped conductive base material

21: ventilation means 31: light source having a wavelength range of 200 nm or more

32A, 33A: Electric cleaner 33: Fan (ventilating means)

35: antistatic device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for adding negative particles to air, and more particularly, to a negative particle generator using photoelectrons generated by the photoelectric effect.

Conventional negative particle generators generate photoelectrons by irradiating the photoelectron emitter with ultraviolet light, and high clean air in which fine particles have been removed by a fan and a dust collecting filter enters the device, and fine particles which have not been removed by a dust collecting filter or the like are optoelectronic. Trapped to form negative particles, and some were released from the apparatus into the air (see Patent Document 1, for example).

As a conventional negative particle generator, there is one shown in FIG. 18 (see Patent Document 2, for example).

In FIG. 18, the photoelectron generating material 51 is provided inside the container 56. The photoelectric generator 51 is equipped with an electrical ground 55, and photoelectrons are generated from the photoelectron generator 51 by ultraviolet rays from the light source 52, and water in the air coming from the air inlet 53 Particles, such as oxygen or fine particles, such as dust, are controlled by the flow path control member 57, passing through the surface of the photoelectron generating material 51, and the photoelectrons are trapped and discharged from the air outlet 54 as negative particles out of the apparatus.

Moreover, there exists a discharge type thing as a technique of generating the conventional negative particle (for example, refer patent document 3). Patent Document 3 discloses a discharge in gas in a technique for generating negative particles.                         

(Patent Document 1) Japanese Patent Publication No. Hei 8-10616

(Patent Document 2) Patent Publication No. 3322267

(Patent Document 3) Japanese Patent Laid-Open Publication No. 63-78471

However, in the above conventional configuration, there has been a problem that the generation of negative particles starting from ultraviolet irradiation to the photoelectron emitting material decreases with time.

Moreover, since the flow volume of air reduces by providing a flow path control material, the photoelectron which generate | occur | produced on the surface of an optoelectronic generating material cannot fully be captured, As a result, there also existed a subject that the generation amount of negative particle reduced.

Furthermore, there also existed the problem that ozone generate | occur | produced and the problem of safety | security to a human body, and a member deteriorated by ozone.

This invention solves the said conventional subject, Comprising: It aims at providing the negative particle generating apparatus which does not reduce the generation amount of negative particle even if time passes.

It is also an object of the present invention to provide an electrostatic elimination device without ozone generation and a device using the same.

MEANS TO SOLVE THE PROBLEM In order to solve the said conventional subject, the negative particle generation apparatus of this invention uses the photoelectron emission plate which has a barrier property on the board | substrate, and provided the emission film which discharge | releases a photoelectron by light irradiation. To generate.

The inventors have found that the cause of the decrease in the number of negative particles is that the compound other than the photoelectron emitting material diffused through the pinhole of the photoelectron emitting material by light irradiation covers the surface of the photoelectric emitting material. As a result, by providing the release film with high barrier property, the amount of generation of negative particles does not decrease even if time passes.

The invention according to claim 1 has a structure having a barrier property on a substrate and an emission film which emits photoelectrons by light irradiation. Accordingly, by diffusing an emission film that emits photoelectrons by light irradiation and preventing the base material from covering the surface of the film, the number of negative ions does not significantly decrease due to the generation time of negative particles, i.e., the durability is excellent over a long period of time. It becomes a publication.

Invention of Claim 2 is characterized by the board | substrate of Claim 1 having electroconductivity. As a result, the generation of negative particles makes it possible to replenish the electrons of the insufficient photoelectron emission plate by electrically grounding the conductive substrate, resulting in a photoelectron emission plate that is excellent in durability and emits many negative particles over a long period of time.

Invention of Claim 3 is characterized by the board | substrate of Claim 2 being stainless especially. As a result, the surface of the stainless metal component due to light irradiation is blocked by a surface oxide film having a high density of stainless, resulting in a photoelectron emission plate which is more durable and emits many negative particles over a long period of time.

Invention of Claim 4 has a conductive film especially under the emission film on the board | substrate of any one of Claims 1-3. It is characterized by the above-mentioned. Accordingly, even if the substrate is an insulating material, for example, by generating negative particles, the electrons of the insufficient photoelectron emission plate can be replenished by electrically grounding the conductive film, which is excellent in durability and emits many negative particles over a long period of time. It becomes a photoelectron emission plate.

In particular, the invention described in claim 5 is characterized in that the conductive film according to claim 4 is a metal. As a result, since the conductivity of the conductive film is high, the generation of negative particles makes it possible to quickly replenish electrons of the insufficient photoelectron emission plate, thereby providing excellent durability and emitting a large number of negative particles over a long period of time. Becomes

The invention according to claim 6 is characterized in that the film thickness of the emission film according to any one of claims 1 to 5 is thicker than the maximum surface roughness of the surface below it. As a result, since the outermost surface of the photoelectron emission plate is covered with a barrier film that emits photoelectrons and prevents the diffusion of the base material, the photoelectron emission plate is excellent in durability and emits many negative particles over a long period of time.

The invention according to claim 7 is characterized in that the emission film according to any one of claims 1 to 6 is produced by vapor deposition. As a result, the barrier property is improved, thereby providing a photoelectron emission plate that emits negative particles having excellent durability over a long period of time.                         

In particular, the invention described in claim 8 is characterized in that the emission film according to any one of claims 1 to 7 is conductive. As a result, the generation of negative particles makes it possible to electrically ground the electrons of the insufficient photoelectron emission plate directly to the film, thereby providing a photoelectron emission plate that is excellent in durability and emits many negative particles over a long period of time.

In particular, the invention described in claim 9 is characterized in that the emission film according to any one of claims 1 to 8 is a ceramic. Thereby, since barrier property improves, it becomes a photoelectron emission plate which emits the negative particle which was excellent in durability over a long term.

The invention according to claim 10 is particularly characterized in that the emission film according to claim 9 is any one of titanium nitride, titanium carbide, zirconium nitride, zirconium carbide, and carbon. . As a result, since the work function in the photoelectric effect is smaller than that of the other, it becomes possible to emit more negative particles, and also becomes an optoelectronic emission plate which emits negative particles in visible light. In the case of graphite, carbon has a large photoelectric effect, and in the case of DLC (Diamond Like Carbon), the photoelectric effect is inferior to graphite, but since the film is dense, it is excellent in durability.

Invention of Claim 11 is a negative particle generator provided with the photoelectron emission plate of Claim 1, and the light source for irradiating light to the said photoelectron emission plate. As a result, the number of negative ions does not decrease greatly with the generation time of negative particles, that is, the negative particle generating device is excellent in durability over a long period of time.

Invention of Claim 12 was made into the negative particle generator which provided the photoelectron emission plate of Claim 2, the light source for irradiating light to the said photoelectron emission plate, and grounded the board | substrate of the said photoelectron emission plate electrically. Thereby, the generation of negative particles causes the electrons of the photoelectron emission plate, which is insufficient, to be replenished by electrically grounding the conductive substrate, so that the negative particle generator that has excellent durability and emits many negative particles over a long period of time. do.

The invention according to claim 13 is a negative particle generator comprising the photoelectron emission plate according to claim 4 and a light source for irradiating light to the photoelectron emission plate and electrically grounding the conductive film of the photoelectron emission plate. As a result, the generation of negative particles makes it possible to quickly replenish the electrons of the insufficient photoelectron emission plate, resulting in a negative particle generating device which is excellent in durability and emits many negative particles over a long period of time.

In particular, the invention described in claim 14 generates negative particles by flowing oxygen to the surface of the photoelectron emission plate according to any one of claims 11 to 13. Thereby, more oxygen negative particles can be supplied.

Further, for example, when oxygen negative particles can be supplied and used in an air purifier, the effect of relaxation in the space is used, and when used in a refrigerator, antioxidation and moisturizing effects of food are prevented, and antistatic in semiconductor manufacturing equipment. Can be maintained over a long term.

Moreover, these complex compounds are effective as a film | membrane which has barrier property and emit | releases a photoelectron by light irradiation other than the above-mentioned.

In addition to the above, as the substrate, a metal or an alloy such as aluminum is effective as having conductivity. Moreover, even if it does not have electroconductivity, glass, a plastic, etc. are effective, and a conductive film can be provided between the film | membrane property and the film | membrane which emit | releases a photoelectron by light irradiation, and can electrically ground it, and can add a lot of negative particles. .

As the conductive film, besides the metal film, for example, conductive ceramics such as ITO or tin oxide or composite compounds thereof are effective.

Invention of Claim 15 was made the structure which forms the barrier film which has barrier property on a board | substrate, and forms the emission film which emits photoelectron by light irradiation on the said barrier film. As a result, the barrier film prevents the base material from which the film that emits photoelectrons by light irradiation covers the surface of the film with a barrier film, so that the negative ion number does not decrease significantly with the generation time of negative particles, that is, over a long period of time. It becomes a durable photoelectron emission plate.

The invention described in claim 16 is particularly characterized in that the barrier film according to claim 15 is each oxide of Si, Ti, Zr, Al, or each nitride of Si, Al, or a composite thereof. Thereby, since the barrier property of a barrier film improves remarkably, it becomes a photoelectron emission plate excellent in durability for a long term.                         

The invention described in claim 17 is particularly characterized in that the barrier film according to claim 15 has conductivity. And the photoelectron emission plate which is insufficient by the photoelectron emission plate which has a barrier property and the electroconductive film and the film | membrane which emits photoelectron by light irradiation directly on it, even if a board | substrate is an insulating material, for example by the generation of negative particles. Electrons can be replenished by electrically grounding the conductive film, thereby providing a photoelectron emission plate that is excellent in durability and emits many negative particles over a long period of time.

The invention described in claim 18 is particularly characterized in that the barrier film according to claim 17 is each nitride or carbide of Ti, Zr or ITO or tin oxide or a composite thereof. As a result, the barrier property of the barrier film is remarkably improved, and therefore, it becomes an optoelectronic emission plate which is excellent in durability and emits many negative particles over a longer period.

In particular, the invention described in claim 19 is characterized in that the substrate according to claim 17 has conductivity. Then, the photoelectric emission plate having a barrier-conductive conductive film on the conductive substrate and a film that emits photoelectrons by irradiating light directly on the conductive substrate allows the conductive substrate to be electrically connected to the electrons of the insufficient photoelectron emitting plate via barrier property and conductivity. It can be supplemented by being grounded, so that it becomes an optoelectronic emission plate which is excellent in durability and emits many negative particles over a long period of time.

The invention described in claim 20 is particularly characterized in that the substrate according to claim 17 is stainless. As a result, stainless blocks the surface diffusion of the stainless metal component by light irradiation by a dense surface oxide film, resulting in a photoelectron emission plate that is more durable and emits many negative particles over a long period of time.

In particular, the invention described in claim 21 is characterized in that the emission film according to any one of claims 15 to 20 is conductive. As a result, the generation of negative particles makes it possible to electrically ground the electrons of the insufficient photoelectron emission plate directly to the film, thereby providing a photoelectron emission plate that is excellent in durability and emits many negative particles over a long period of time.

The invention according to claim 22 is characterized in that the film thickness of the emission film according to any one of claims 15 to 21 is thicker than the maximum surface roughness of the surface of the barrier film. As a result, since the outermost surface of the photoelectron emission plate is covered with a barrier film that emits photoelectrons and prevents the diffusion of the base material, the photoelectron emission plate is excellent in durability and emits many negative particles over a long period of time. .

The invention according to claim 23 is a negative particle generator comprising the photoelectron emission plate according to claim 15 or 17 or 19 and a light source for irradiating light to the emission film of the photoelectron emission plate. As a result, the number of negative ions does not decrease significantly, i.e., it becomes a negative particle generator having excellent durability over a long period of time.

In particular, the invention described in claim 24 generates negative particles by flowing oxygen to the surface of the photoelectron emission plate according to claim 23. Thereby, more oxygen negative particles can be supplied.                         

For example, when oxygen minus particles are used in an air purifier, the effect of relaxation in the space, and when used in a refrigerator, can prevent the oxidation and moisturizing effects of foods, and can maintain an antistatic effect for a long time in a semiconductor manufacturing facility. .

As the barrier film, in addition to the above, ceramic films and composite compounds thereof are effective.

In addition to the above, as the substrate, a metal or an alloy such as aluminum is effective as having conductivity. Moreover, even if it does not have electroconductivity, glass, plastics, etc. are effective, and a negative particle can be increased by forming a film | membrane which has barrier property and electroconductivity, and electrically grounding it.

In addition to the above, conductive ceramics or composite compounds thereof are effective as the conductive film having the barrier property.

Moreover, as a film | membrane which emits photoelectron by light irradiation, a metal or a conductive ceramic is effective.

The invention as set forth in claim 25 is provided with a container having an electrically grounded mesh-shaped photoelectric generator and a light source for irradiating light to the mesh-shaped photoelectric generator, wherein the mesh-shaped photoelectric generator is irradiated with light. And a negative particle generator in which negative particles are generated by flowing air into the meshed photoelectric generator, wherein the meshed photoelectric generator is impregnated in the container so that air flowing in the vessel collides with the meshed photoelectric generator. I made it.

As a result, by forming the photoelectron generating material into a mesh shape, even if the mesh type photoelectric generating material is provided at a position to block the passage of air flowing in the container without providing a flow path control material, the air is formed in the mesh of the photoelectric generating material. Since it flows backward through the snow, the flow rate of the air can be ensured without substantially blocking the flow of the air. And since the flow rate of air does not decrease by a flow path control material etc., it is possible to realize the negative particle generator which can generate negative particles efficiently, without reducing the quantity of the negative particle generated from the negative particle generator. do.

In particular, the invention described in claim 26 uses ultraviolet light to irradiate the mesh-shaped photoelectron generating material according to claim 25.

As a result, if the light generated from the light source is ultraviolet light, since the energy is high, many photoelectrons are likely to be generated by the photoelectric effect, so that more negative particles can be emitted out of the device.

The invention described in claim 27 is particularly provided by providing the mesh-shaped photoelectron generating material according to claim 25 or 26 on a mesh-shaped conductive base material.

When a precious metal such as gold is used as the photoelectron generating material, for example, by providing it on a mesh-shaped conductive substrate, even if the layer of the photoelectron generating material is a thin layer, it can be a member having mechanical strength.

The invention described in claim 28 is provided with a ventilation means, in addition to the invention according to any one of claims 25 to 27, wherein the air flows through the mesh-like photoelectric generator by the ventilation means.                         

Photoelectrons are emitted from the photo-generated material irradiated with light, and holes, which are traces of the photoelectrons being escaped by electrically grounding the photo-generators, are quickly electrically neutralized, making it difficult for the photons to return to the holes. However, even if the photoelectron generating material is electrically neutralized, an electric image force is applied between the photoelectric and the photoelectric generating material, so that the photoelectron is returned to the photoelectric generating material although weak. Therefore, a means for promptly detaching the generated photoelectrons from the photoelectron generating material is required, and the inventors have found that ventilation is particularly effective as the means. That is, since the photoelectron generated by the ventilation to the photoelectron generating material is separated from the photoelectric generating material while colliding with the gas molecules, the tendency for the photoelectron to return to the photoelectric generating material is weakened, and as a result, negative particles are efficiently generated from the apparatus.

The invention according to claim 29 has a light source having a wavelength region of 200 nm or more, a photoelectron emitting plate which emits photons when irradiated with light, and ventilation means for passing a gas containing at least oxygen near the surface of the photoelectron emitting plate. It is an antistatic device which removes the positive charge of the said member by injecting the gas which passed near the surface of the photoelectron emission material irradiated by the to the member. Thereby, negative ozone particle | grains of oxygen generate | occur | produce without generating ozone, and spraying this on a member can remove the positive charge of a member.

The invention as set forth in claim 30 is a charge removal device that emits photoelectrons when the surface of the photoelectron emitting plate is irradiated with light, and is also a barrier film. It is a film that emits photoelectrons and has a barrier film directly below it. As a result, by diffusing a film that emits photoelectrons by light irradiation and preventing the base material from covering the film surface, the number of negative ions does not decrease significantly due to the generation time of negative particles, that is, durability over a long period of time. It becomes an excellent antistatic device.

The invention as set forth in claim 32 is characterized in that the surface of the photoelectron emission material is electrically grounded, and since the positively charged photoelectron emission material by electron emission is quickly removed, more negative particles are generated. The removal of the positive charge and the dust can be promptly performed.

The invention according to claim 33 is provided with the antistatic device according to any one of claims 29 to 32, and dust and floor surfaces adhered to the floor surface by injecting a gas of the antistatic device from the suction nozzle toward the floor surface. Because it becomes electrification only for minus by removing positive charge of charge and sucking dust attached to floor surface, and do not rub floor surface with brush etc. There is no damage, and dust attached to the floor surface can be removed without causing discomfort to the operator.

The invention according to claim 34 is provided with the antistatic device according to any one of claims 29 to 32, and the dust of the dust collected and the positive charge of the dust collecting part wall are discharged by injecting the gas of the antistatic device toward the dust collecting unit. As it is electric charge only for minus with electric vacuum cleaner which removed and attached dust in dust collection part easily, we can easily remove dust collected without rubbing, and there is no ozone generation For example, it does not damage plastics. In addition, it does not cause an inconvenience to the worker.

Invention of Claim 35 is provided with the charge removal apparatus in any one of Claims 29-32, and discharge of the gas of the said charge removal apparatus is carried out at high pressure, and the dust attached to the member and the positive charge of the member are prevented. The air blowing device that removes and blows off the dust attached to the member causes negative charging. Therefore, the dust of the member can be easily removed without requiring a strong power output. In addition, since ozone is not generated, no damage to the member is given. Also, no discomfort is given to the worker.

The invention according to claim 36 is particularly characterized in that the member according to claim 35 is a semiconductor or a liquid crystal or an optical disk member. And since these members dislike dust at the submicron level, the method of the present invention is most appropriate.

According to a thirty-seventh aspect of the present invention, there is provided the antistatic device according to any one of Claims 29 to 32, and the discharge of the gas of the antistatic device is performed at a high pressure, whereby positive charge of dust and members attached to the human body is prevented. It is an air shower device that removes and blows dust attached to the human body, so that only negative charge is applied, and dust of the human body can be easily removed without the need for powerful power output. In addition, since ozone is not generated, it does not cause any damage or discomfort to the human body.

In addition, as a film having a barrier property and emitting photoelectrons by light irradiation, a conductive film or a ceramic film is preferable. Specifically, titanium nitride, titanium carbide, zirconium nitride, zirconium carbide and composite compounds thereof are effective.

Moreover, as a board | substrate, the metal or alloy which has electroconductivity, such as stainless steel and aluminum, is effective. With this configuration, it is possible to electrically ground not only the surface but also the substrate. Moreover, it is not necessary to have electroconductivity, glass, plastic, etc. are effective, and an electroconductive film can be provided between the film | membrane which emits photoelectron by barrier property and light irradiation, and can also electrically ground with it. As the conductive film, besides a metal film, for example, a conductive ceramic such as ITO or tin oxide or a composite compound thereof is effective.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings. In addition, this invention is not limited by this Example.

(Example 1)

The negative ion generating apparatus of Example 1 of this invention is demonstrated using FIG. Reference numeral 1 denotes an optoelectronic emission plate, reference numeral 2 denotes a lamp (light source) for irradiating light to the reference numeral 1, and the optoelectronic emission plate 1 is an upper and lower walls of the ventilation holes to fit the lamp 2. Is grounded. A fan is installed behind the ventilation openings to allow air to flow through the ventilation openings. In addition, when there is no special specification, the earth wire 3 electrically connected to the board | substrate side of the photoelectric emission board 1 is provided.                     

In addition, the lamp 2 used the 6-W cold cathode tube, and made the air-blowing amount 200L / min. In addition, all the switches were turned on unless otherwise specified.

8 is a conceptual diagram showing the mechanism of photoelectron generation when an ultraviolet lamp is used as the lamp 2.

As the photoelectron emission plate of the present embodiment, 1 micrometer of titanium nitride is deposited on an acrylic substrate to produce a photoelectron emission plate 1A, mounted on the negative ion generating device of FIG. 1, and the number of negative particles with respect to the operation time is measured. did. In addition, electrical grounding was performed with a titanium nitride film.

In addition, as a comparison photoelectron emission plate for comparison with the photoelectron emission plate 1A of the present embodiment, 1 µm of gold was deposited on an acrylic substrate to produce a photoelectron emission plate 1B, and the negative ion generator of FIG. It mounted and measured the number of negative particles with respect to operation time. In addition, electrical installation was performed with a gold curtain.

2 is the number of negative particles versus the operating time of the photoelectron emission plates 1A and 1B. It can be seen that the photoelectron emission plate 1A having a barrier property maintains the number of negative particles over a long period of time, and it can be seen that the photoelectron emission plate 1A exhibits the effects of the present invention.

(Example 2)

As the photoelectron emitting plate of Example 2, 1 micrometer of titanium nitride was deposited on a brass substrate to deposit the photoelectron emitting plate 2A, and 1 micrometer of titanium nitride was deposited on the stainless substrate to form the photoelectron emitting plate 2B. It produced and mounted in the negative ion generator of FIG. 1, and measured the number of negative particles with respect to operation time.

In addition, as a comparison photoelectron emission plate for comparison with the photoelectron emission plates 2A and 2B of the present embodiment, 1 µm of titanium nitride was deposited on an acrylic substrate to produce a photoelectron emission plate 2C, and the negative ion of FIG. It mounted on the generator and the number of negative particles with respect to the operation time was measured.

3 is the number of negative particles versus the operating time of the photoelectron emission plates 2A and 2B and 2C. It can be seen that the photoelectron emission plates 2A and 2B having a conductive film on the base emit a large number of negative particles, and that the side of 2B is maintained for a long time. It turns out that the effect of this invention is exhibited.

(Example 3)

As the photoelectron emission plate of Example 3, aluminum was deposited on an acrylic substrate, and 1 µm of titanium nitride was deposited thereon to produce the photoelectron emission plate 3A, mounted on the negative ion generating device of FIG. 1, and operated. The number of negative particles over time was measured. In addition, electrical installation was performed with the aluminum film.

4 shows the number of negative particles with respect to the operating time of the photoelectron emission plate 3A and the photoelectron emission plate 2C in Example 2. FIG. It can be seen that the photoelectron emission plate 3A having the conductive film in the base maintains a large number of negative particles over a long period of time, and it can be seen that the photoelectron emission plate 3A exhibits the effects of the present invention. .

(Example 4)                     

As the photoelectron emitting plate of Example 4, titanium nitride 0.1 (4A), 0.5 (4B), 1 (4C) and 2 (4D) 占 퐉 are deposited on a stainless substrate (maximum surface roughness 0.8 占 퐉) to form a photoelectron emitting plate 4A. 4D) were produced, mounted on the negative ion generating device of FIG. 1, and the number of negative particles with respect to the operation time was measured.

5 is the number of negative particles versus the operating time of the photoelectron emission plates 4A to 4D. It can be seen that the photoelectron emission plates 4C and 4D having a titanium nitride film thickness thicker than the maximum surface roughness of the base maintain a large number of negative particles over a long period of time. It turns out that the effect of this invention is exhibited.

Further, as a comparison photoelectron emission plate for comparison with the photoelectron emission plate 4C of this embodiment, a film of 1 µm titanium nitride was sputtered on a stainless substrate (maximum surface roughness 0.8 µm) to produce a photoelectron emission plate 4E. Was prepared, mounted in the negative ion generating device of FIG. 1, and the number of negative particles with respect to the operation time was measured.

Fig. 6 is the number of negative particles with respect to the operation time of the photoelectron emission plates 4C and 4E (both titanium nitride film thickness of 1 mu m). It can be seen that the photoelectron emission plate 4C produced by the compact vapor deposition method of the titanium nitride film maintains a large number of negative particles over a long period of time, indicating that the photoelectron emission plate 4C exhibits the effect of the present invention. Able to know.

(Example 5)

As the photoelectron emission plate of Example 5, a graphite film 1 μm (5A) and a DLC film 5B were formed on a stainless substrate (maximum surface roughness 0.8 μm), and 182 nm of the lamp of the negative ion generator of FIG. 1 was emitted. It mounted in the apparatus replaced with the lamp, and measured the number of the negative particle with respect to the operation time, and compared with the photoelectric emission plate of 4C of Example 4.

7 is the number of negative particles versus the operating time of the photoelectron emission plates 5A, 5B, and 4C. It can be seen that the photoelectron emitting material 5A using graphite as the photoelectron emitting material initially emits many negative particles. On the other hand, although the photoelectron emission material 5B which used DLC for the photoelectron emission material initially has a small number of negative particles, it turns out that this has been maintained over the long term.

(Example 6)

The negative ion generating apparatus of Example 6 of the present invention will be described with reference to FIG. Reference numeral 1 denotes an optoelectronic emission plate, reference numeral 2 denotes a lamp (light source) for irradiating light to the reference numeral 1, and the optoelectronic emission plate 1 is an upper and lower walls of the ventilation holes to fit the lamp 2. Is grounded. A fan is installed behind the ventilation openings to allow air to flow through the ventilation openings. In addition, when there is no special designation, the earth wire 3 electrically connected to the board | substrate side of the photoelectron emission board 1 is provided.

In addition, the lamp 2 used the 6-W cold cathode tube, and made the air blow volume of 200 L / min. In addition, all the switches were turned on unless otherwise specified.

As the photoelectron emission plate of this embodiment, 1 µm of silica is provided on an acrylic substrate by sputtering, 1 µm of gold is deposited thereon to produce a photoelectron emission plate 6A, and the negative ion generator of FIG. And the number of negative particles with respect to the operation time were measured. In addition, electrical grounding was performed with a gold film.

In addition, as a comparison photoelectron emission plate for comparison with the photoelectron emission plate 1A of the present embodiment, 1 µm of gold was deposited on an acrylic substrate to produce a photoelectron emission plate 1B, and the negative ion generator of FIG. It mounted and measured the number of negative particles with respect to operation time. In addition, electrical grounding was performed with a gold film.

9 is the number of negative particles with respect to the operating time of the photoelectron emission plates 6A and 6B. It can be seen that the photoelectron emission plate 6A having a barrier property maintains the number of negative particles over a long period of time, and it can be seen that the photoelectron emission plate 6A exhibits the effects of the present invention.

(Example 7)

Next, as the photoelectron emitting plate of Example 7, 1 micrometer of titanium nitride was deposited on an acrylic substrate, and 1 micrometer of gold was deposited thereon to produce a photoelectron emitting plate 7A, and to the negative ion generator of FIG. It mounted and measured the number of negative particles with respect to operation time. In addition, electrical grounding was performed with titanium nitride.

In addition, as a comparison photoelectron emission plate for comparison with the photoelectron emission plate 7A of the present embodiment, 1 µm of silica was provided on an acrylic substrate by a sputtering method, and 1 µm of gold was deposited thereon to photoelectron emission plate 7B. Was prepared, mounted in the negative ion generating device of FIG. 1, and the number of negative particles with respect to the operation time was measured. In addition, electrical grounding was performed with silica.

10 is the number of negative particles versus the operating time of the photoelectron emission plates 7A and 7B. It can be seen that the photoelectron emission plate 7A having the conductive film on the base emits and maintains a large number of negative particles over a long period of time, and it can be seen that the photoelectron emission plate 7A exhibits the effect of the present invention. have.

(Example 8)

Next, as the photoelectron emitting plate of Example 8, 1 micrometer of titanium nitride was deposited on a brass substrate, and 1 micrometer of gold was deposited thereon, and the photoelectron emitting plate 8A was deposited on a stainless substrate. Vapor was deposited, and 1 micrometer of gold was deposited thereon, the photoelectron emission plate 8B was produced, mounted in the negative ion generating device of FIG. 1, and the number of negative particles with respect to the operation time was measured.

In addition, as a comparison photoelectron emission plate for comparison with the photoelectron emission plate 8A of this embodiment, 1 µm of titanium nitride was deposited on acryl and 1 µm of gold was deposited thereon to produce a photoelectron emission plate 8C. Then, it mounted on the negative ion generating device of FIG. 1, and measured the number of negative particles with respect to operation time.

11 is the number of negative particles versus the operating time of the photoelectron emission plates 8A, 8B, and 8C. It can be seen that the photoelectron emitting plates 8A and 8B emit a large number of negative particles in the case where the substrate is conductive, and that the side of 8B is maintained for a long time, and thus the photoelectron emitting plates 8A and 8B. It turns out that this effect of this invention is exhibited.

(Example 9)

12 is a sectional view of principal parts of the negative particle generator in Example 9 of the present invention. In FIG. 12, a mesh-shaped photoelectron generating material 4 is provided in the inner circumference of the substantially cylindrical container 9 and in the vicinity of the air outlet 7. The photoelectron generating material 4 provided near the air outlet 7 is provided so as to be substantially perpendicular to the flow direction of air. An electrical ground 8 is attached to the mesh photoelectric generator 4. Photoelectrons are generated from the mesh-shaped photoelectron generating material 4 by light such as ultraviolet rays from the light source 5, and photoelectrons are generated by particles in the air, water or oxygen in the air coming from the air inlet 6, or particles such as oxygen. It is trapped and released out of the device from the air outlet 7 as negative particles.

In this embodiment, the mesh-shaped photoelectron generating material 4 is one or more selected from among gold, platinum, silver, copper, stainless, and titanium nitride. These photoelectron generating materials are suitable for efficiently generating negative particles because the work function is small and photoelectrons are efficiently generated on the metal surface when irradiated with light.

In addition, in this embodiment, the electrical ground 8 is attached to the mesh-like photoelectric generator 4. Holes are generated in the photoelectron generating material 4 in which the photoelectrons are emitted by the photoelectric effect, and electrical attractive force acts between the photoelectrons and the holes, so that the generated photoelectrons are adsorbed on the photoelectric generating material 4. Since the photoelectron generating material 4 is electrically grounded therein, the holes are supplemented with electrons, so that the emitted photoelectrons do not return to the holes, and thus are suitable for generating without reducing the negative particles.

Hereinafter, the effect of this embodiment is demonstrated using an experiment example.

As the container 9, a container made of stainless steel having an inner diameter of 3 cm and a length of 7 cm was used, and gold having a thickness of 0.1 mm was used as the mesh-shaped photoelectron generating material 4. In addition, an ultraviolet lamp of 3 W was used as the light source 5.

The electrical ground 8 was attached to the mesh-shaped photoelectron generating material 4, and the experiment for evaluating the performance of the negative particle generating apparatus of a present Example was performed. The ultraviolet germicidal lamp of the light source 5 was turned on to generate negative particles. The measurement was performed at a position of 1 cm from the air outlet 7, and the number of negative particles per unit volume was measured by an ion meter every 10 minutes from after the device was operated.

Moreover, with the apparatus shown in FIG. 18 as a prior art example, the same test as above was performed and the number of negative particles was measured. These test results are put together and are shown in FIG.

As is clear from the results of FIG. 13, it can be seen that when the negative particle generator of the present invention is used, the amount of generation of negative particles is more stable than in the conventional example.

(Example 10)

14 is a sectional view of principal parts of the negative particle generator in Example 10 of the present invention. In FIG. 14, the meshed photoelectron generating material 11 is the same as that of Example 9 except having been supported on the surface of the mesh-shaped electroconductive base material 12, and the same code | symbol is attached | subjected to the same part. Omit.

In the present embodiment, the photoelectron generating material 11 uses one or more selected from gold, platinum, silver, copper, stainless, and titanium nitride. Since these photoelectron generating materials have a small work function and efficiently generate photoelectrons on the metal surface when irradiated with ultraviolet rays, they are suitable for efficiently generating negative particles.                     

In this embodiment, the electrical ground 8 is attached to the mesh conductive base 12. The photoelectron generating material 11 in which the photoelectrons are emitted by the photoelectric effect can hole in the emission point of the photoelectrons, and electrical attractive force acts between the photoelectrons and the holes, so that the generated photoelectrons are adsorbed onto the photoelectric generating material. Therefore, by electrically grounding the conductive base material, holes are supplemented with electrons, so that the emitted photoelectrons do not return to the holes, and thus are suitable for generating without reducing negative particles.

Hereinafter, the effect of this embodiment is demonstrated using an experiment example.

As the container 9, a cylindrical container made of stainless steel having an inner diameter of 3 cm and a length of 7 cm was used, and stainless steel having a thickness of 0.5 mm was used as the mesh-shaped conductive base material 12, and gold was used as the mesh-shaped photoelectron generating material 11. Plated. In addition, an ultraviolet germicidal lamp of 3 W was used as the light source 5.

The electrical ground 8 was attached to the mesh-shaped conductive base material 12, and the experiment for evaluating the performance of the negative particle generator of this Example was performed. The ultraviolet germicidal lamp of the light source 5 was turned on to generate negative particles. The measurement was performed at a position of 1 cm from the air outlet 7, and the number of negative particles per unit volume was measured by an ion meter every 10 minutes from after the device was operated. The test results are shown in FIG. 15.

As is clear from the results of FIG. 15, when the negative particle generator of the present invention was used, stable negative particle generation was always observed. From this, the present invention was able to realize the supply of negative particles to the air at all times without reducing the occurrence of negative particles.                     

(Example 11)

16 is a sectional view of principal parts of the negative particle generator in Example 11 of the present invention. In FIG. 16, it is the same as that of Example 10 except having provided the ventilation apparatus 21, the same code | symbol is attached | subjected to the same part, and detailed description is abbreviate | omitted.

In the present embodiment, the photoelectron generating material 11 uses one or more selected from gold, platinum, silver, copper, stainless, and titanium nitride. Since these photoelectron generating materials have a small work function and efficiently generate photoelectrons on the metal surface when irradiated with ultraviolet rays, they are suitable for efficiently generating negative particles.

In this embodiment, the electrical ground 8 is attached to the mesh conductive base 12. The photoelectron generating material 11 in which the photoelectrons are emitted by the photoelectric effect can hole at the emission point of the photoelectrons, and electrical attractive force acts between the photoelectrons and the holes, so that the generated photoelectrons are adsorbed on the photoelectric generating material. Therefore, by electrically grounding the conductive base material, holes are supplemented with electrons, so that the emitted photoelectrons do not return to the holes, and thus are suitable for generating without reducing negative particles.

Hereinafter, the effect of this embodiment is demonstrated using Experimental example 1.

As the container 9, a container made of stainless steel having an inner diameter of 3 cm and a length of 7 cm was used, and stainless steel having a thickness of 0.5 mm was used as the mesh-shaped conductive base material 12, and gold was plated as the photoelectron generating material 11. In addition, an ultraviolet lamp of 3 W was used as the light source 5.                     

The electrical ground 8 was attached to the mesh-shaped conductive base material 12, and the experiment for evaluating the performance of the negative particle generator of this Example was performed. The ultraviolet lamp of the light source 5 was turned on, and the ventilation means 21 was operated to generate negative particles. The measurement was performed at a position 1 cm from the air outlet 7, and the number of negative particles per unit volume was measured by an ion meter every 10 minutes from after the operation of the apparatus. The test results are shown in FIG. 17.

As is clear from the results of FIG. 17, when the negative particle generator of the present invention is used, the generation of stable negative particles is always observed. From this, by using the ventilation means, the generation of the negative particles was further increased, and the supply of the negative particles into the space was always realized constantly.

Next, the effect of a present Example is demonstrated using Experimental Example 2. FIG.

As the photoelectron generating material 11, negative particles were measured in the same manner as in Experimental Example 1, using a negative particle generator composed of gold, platinum, silver, copper, stainless steel, and titanium nitride. In addition, the measurement was performed at the position which is 1 cm from the air outlet 7, and the number of the negative particle per unit volume was measured with the ionometer 2 minutes after the apparatus operation | movement. Table 1 shows the measurement results.

Type of photoelectron generating material Number of negative particles generated (pcs / cc) Au 270,000 Pt 120,000 Ag 90,000 Cu 50,000 stainless 10,000 TiN 420,000

As is clear from the results in Table 1, it was found that using the negative particle generator of the present embodiment, when gold, platinum, silver, copper, stainless, and titanium nitride were used as the photoelectron generating material, many negative particles were generated. . Among them, it was found that a large amount of negative particles are generated especially when gold, platinum and titanium nitride are used.

Next, the effect of a present Example is demonstrated using Experimental Example 3. FIG.

As a photoelectron generating material 11, negative particles were measured in the same manner as in Experimental Example 1, using a negative particle generating device made of copper, aluminum, stainless steel, and brass as the conductive substrate 12 in the form of gold. In addition, the measurement was performed at the position of 1 cm from the air outlet 7, and 2 minutes after the operation of the apparatus, the number of negative particles per unit volume was measured with an ionometer. The measurement results are shown in Table 2.

Kind of conductive member Number of negative particles generated (pcs / cc) Cu 390,000 Al 350,000 stainless 420,000 brass 400,000

As is clear from the results in Table 2, it was found that using the negative particle generator of the present embodiment, when gold, copper, aluminum, stainless, and brass were used as the photoelectron generating material and copper, aluminum, stainless, and brass as the conductive substrate, many negative particles were generated. Among them, it was found that a large amount of negative particles are generated, especially when stainless is used.

Further, in Examples 9 to 11, although a container made of stainless steel having an inner diameter of 3 cm and a length of 7 cm was used, the shape, size, thickness, and type are not limited, and the shape can be applied as a negative particle generator. Any size or thickness or type may be used.

In Example 10 and Example 11, stainless steel having a thickness of 0.5 mm was used as the mesh-shaped conductive base material, but the thickness and type are not limited, but any type of conductive material can be used as long as it is conductive and can support the photoelectron generating material. none.

As mentioned above, in the present Example, the negative particle generating apparatus which adds negative particle to space was obtained. Furthermore, it is needless to say that the air conditioner provided with the negative particle generator of this embodiment is applicable to an air purifier, an air conditioner, a fan heater, a dehumidifier, a humidifier, a deodorizer such as a nursing skatole, a deodorizer for a bathroom, and the like. none.

In addition, in the said Example, although the mesh-shaped photoelectron generating material 4 was provided in the inner periphery of the container 9 and the vicinity of the air outlet 7, it is essential to provide in the inner periphery of the container 9 the present invention. It is not a requirement, and it is provided in the air outlet 7 vicinity, and if it is provided in the position which cuts off the air which flows in the container 9 (it does not actually block because it is a network shape,), it does not interfere, and the air outlet ( 7) It is not limited to the vicinity.

Further, in the above embodiment, the mesh-shaped photoelectron generating material 4 is provided to be substantially perpendicular to the direction in which the air flows, but the present invention is not limited to this angle. If it collides with (4) or it is installed so as to pass through the eye of the mesh of the photoelectron generating material 4, it will not interfere.

(Example 12)

An apparatus for removing electricity in Embodiment 12 of the present invention will be described with reference to FIG. 19. Reference numeral 31 is a light source having a wavelength range of 200 nm or more, reference numeral 32 is an optoelectronic emission plate, and the photoelectron emission plate 32 is grounded on the upper and lower walls of the ventilation opening so as to sandwich the light source 31. At the rear of the vent, a fan 33 is provided as a vent means for passing a gas containing oxygen at least, so that air is sent to the vent. In addition, when there is no special specification, the earth wire 34 electrically connected to the outermost surface of the board | substrate of the photoelectron emission plate 32 is provided.

In addition, the light source 31 used the cold cathode tube of 6W, and made the air blowing amount 200L / min (pressure variable). In addition, all the switches were turned on unless otherwise specified.

(Example 1)

The photoelectron emission plate 9A was produced by plating 1 µm of gold on the brass substrate, mounted on the de-charge device of FIG. 19, and the number of negative particles neutralizing the positively charged member relative to the operation time was measured. In addition, electrical grounding was performed with brass.                     

(Example 2)

1 micrometer of titanium nitride was deposited on the brass board | substrate, the photoelectron emission board 9B was produced, it mounted in the antistatic apparatus of FIG. 19, and measured the number of the negative particle which neutralizes the positively charged member with respect to the operation time. In addition, electrical grounding was performed with brass.

(Example 3)

The number of negative particles for depositing a SiOx film on a brass substrate, depositing gold thereon to produce a photoelectron emission plate 9C, and mounting it on the de-charge device of FIG. 19 to neutralize the positively charged member relative to the operating time. Was measured. In addition, electrical grounding was performed with gold.

(Charge removal of plus charged plastic)

As a result of injecting the gas of the specific examples 1, 2, and 3 into the positively charged resin, and measuring the positive charge amount, it can be seen that the positive charge amount is decreasing, and the effect of the present invention is exhibited. I could see that. In addition, ozone odor was not recognized in both cases.

(Characteristics of the photoelectron emission material which has barrier property and emits photoelectron by light irradiation)

20 is the number of negative particles with respect to the operating time of the charge removing devices 9A, 9B, and 9C. It can be seen that the photoelectron emission plates 9B and 9C having a barrier property maintain the number of negative particles over a long period as compared to the photoelectron emission plate 9A having no barrier property. , 9C) shows the effects of the present invention.

(Comparative Example 1)

The number of negative particles neutralizing the positively charged member as described above was measured with respect to the antistatic device 9D from which the grounding of the antistatic device 9B of the specific example 2 was removed.

(Number of negative particles neutralizing the positively charged member with or without ground)

As a result of measuring the number of negative ions that neutralize the positively charged member, the charge removal device 9B is 1 million / cm ³ , and the charge removal device 9D is 3000 / cm ³ , The effect of the present invention has been found.

(Example 4)

As shown in FIG. 21, the antistatic device 35 having the same function as the antistatic device 9B of the specific example 2 is mounted on the floor surface side of the suction nozzle of the vacuum cleaner, and the vacuum cleaner 32A (suction) of the present invention is mounted. Efficiency 200 W). Using this, the suction nozzle was reciprocated once on the plastic floor (width is the same width as the suction nozzle) to which 5 g of zeolite adhered.

(Comparative Example 2)

The vacuum cleaner 32B (suction efficiency 200W) similar to the specific example 4 was produced except having not attached the antistatic apparatus 35. As shown in FIG. Using this, the suction nozzle was reciprocated once on the floor (width is the same width as the suction nozzle) of the plastic to which 5 g of zeolite was attached in the same manner as the specific example 4 above.

(Evaluation of Zeolite's Dust Collection Capacity)

As a result of comparing the dust collection amount of the zeolite with the vacuum cleaner 32A and the vacuum cleaner 32B, the electric cleaner 32A is 4.9g, whereas the vacuum cleaner 32B is 3.9g, and the charging of the present invention is performed. The effect of mounting the removal device 35 was demonstrated. In addition, ozone smell could not be recognized by the vacuum cleaner 32A.

(Example 5)

As shown in FIG. 22, the antistatic device 35 having the same function as the antistatic device 9B of the specific example 2 is mounted on the dust collecting part of the main body of the vacuum cleaner, and the vacuum cleaner 33A (suction efficiency 200W) of the present invention is mounted. Made. Using this, 10 g of zeolite was aspirated, the dust collecting part lid was opened, the dust collecting part lid was lowered, and the amount of zeolite collected naturally fell was measured.

(Comparative Example 3)

The vacuum cleaner 33B (suction efficiency 200W) similar to the specific example 5 was produced except having not attached the antistatic apparatus 35. As shown in FIG. Using this, 10 g of zeolite was aspirated in exactly the same manner as in the specific example 5 above, the dust collecting part lid was opened, and the dust collecting zeolite was measured under the dust collecting part.

(Evaluation of Zeolite's Dust Collection Capacity)

As a result of comparing the fall amount of zeolite in the vacuum cleaner 33A and the vacuum cleaner 33B, the vacuum cleaner 33A is 7.9g, whereas the vacuum cleaner 33B is 5.9g, The effect of mounting the antistatic device 35 was demonstrated. Moreover, the dust collection amount with respect to the suction amount 10g was small because it adhered to the suction path of an electric vacuum cleaner, for example, a hose, etc., It turns out that a recovery rate increases when gas is sent also by the antistatic apparatus of this invention. In addition, the smell of ozone could not be recognized in the vacuum cleaner 33A.

(Example 6)

Instead of the fan 33 in the antistatic device 9B of the specific example 2, an air blowing device 34A (not shown) equipped with a compressor (blowing pressure 3kgf / cm ² ) for generating a high pressure gas was manufactured. did. Using this, it sprayed on the 13.3 inch liquid crystal panel glass member which apply | coated 0.1 g glass beads (3 micrometer diameter), and measured the remaining glass beads density.

(Comparative Example 4)

Except not mounting the electrification removal device 9B, the air blowing device 34B (not shown in figure, 200W of suction efficiency) which was the same as the said specific Example 6 was produced completely. Using this, the same method as in the specific example 6 was carried out to spray a 13.3 inch liquid crystal panel glass member coated with 0.1 g of glass beads (3 µm diameter), and the remaining glass beads density was measured.

(Evaluation of Removal Ability of Glass Beads)

As a result of comparing the remaining amount of glass beads in the air blowing device 34A and the air blowing device 34B, the air blowing device 34A is 1 / cm ² or less, whereas the air blowing device 34B is Is 4 x 10 < 3 > / cm < ² >, and the effect of mounting the antistatic device of the present invention was demonstrated. In addition, in the air blowing device 34A, the ozone smell could not be recognized.

Moreover, the same effect was recognized also about a semiconductor and an optical disk member.

In addition, it has the same effect not only on the member but also on the human body, and can be used for air showers in semiconductor factories and the like.

According to the present invention, according to the negative particle generation time, the photoelectron emission plate excellent in durability and the negative particle generating device using the same can be realized without a significant decrease in the number of negative ions.

Claims (37)

And a film having a barrier property on the substrate and emitting photons by irradiation with light, wherein the film thickness of the film is thicker than the maximum surface roughness of the surface below it. The method of claim 1, Characterized in that the substrate is conductive Photoelectron emitter. The method of claim 2, Characterized in that the substrate is stainless Photoelectron emitter. The method of claim 1, Having a conductive film under the emission film on the substrate Photoelectron emitter. The method of claim 4, wherein The conductive film is a metal, characterized in that Photoelectron emitter. delete 6. The method according to any one of claims 1 to 5, Characterized in that the release film is produced by vapor deposition Photoelectron emitter. 6. The method according to any one of claims 1 to 5, The emitting film is conductive Photoelectron emitter. 6. The method according to any one of claims 1 to 5, Characterized in that the emitting film is ceramic Photoelectron emitter. The method of claim 9, Emission film is any one of titanium nitride, titanium carbide, zirconium nitride, zirconium carbide, carbon Photoelectron emitter. And a light source for irradiating light to the photoelectron emission plate. Negative particle generator. The photoelectron emission plate of Claim 2, the light source for irradiating light to the said photoelectron emission plate, and the earth wire which electrically grounds the board | substrate of the said photoelectron emission plate is provided. Negative particle generator. The photoelectron emission plate of Claim 4, the light source for irradiating light to the said photoelectron emission plate, and the earth wire which electrically grounds the electroconductive film of the said photoelectron emission plate is provided. Negative particle generator. The method according to any one of claims 11 to 13, Ventilation means for flowing oxygen to the surface of the photoelectric emission plate, characterized in that to generate negative particles by flowing oxygen to the surface of the photoelectric emission plate Negative particle generator. A photoelectron emission plate comprising a barrier film having barrier properties and conductivity on a substrate, and an emission film for emitting photoelectrons by light irradiation on the barrier film. The barrier film is electrically grounded by an earth wire, and the film thickness of the emission film is thicker than the maximum surface roughness of the surface of the barrier film. Optoelectronic emission plate, characterized in that. The method of claim 15, The barrier film is an oxide of Si, Ti, Zr, Al, or a nitride of Si, Al, or a composite thereof. Photoelectron emitter. delete The method of claim 15, The barrier film is a nitride or carbide of Ti, Zr or ITO or tin oxide or a composite thereof Photoelectron emitter. The method of claim 15, Characterized in that the substrate is conductive Photoelectron emitter. The method of claim 19, Characterized in that the substrate is stainless Photoelectron emitter. The method according to any one of claims 15, 16, 18, 19, 20, The emitting film is conductive Photoelectron emitter. delete A photoelectric emission plate according to claim 15 or 19, and a light source for irradiating light to the emission film of the photoelectric emission plate Negative particle generator. The method of claim 23, Ventilation means for flowing oxygen to the surface of the photoelectric emission plate, characterized in that to generate negative particles by flowing oxygen to the surface of the photoelectric emission plate Negative particle generator. delete delete delete delete delete delete delete delete delete delete delete delete delete

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