JPS6411138B2 - - Google Patents

Info

Publication number
JPS6411138B2
JPS6411138B2 JP17701780A JP17701780A JPS6411138B2 JP S6411138 B2 JPS6411138 B2 JP S6411138B2 JP 17701780 A JP17701780 A JP 17701780A JP 17701780 A JP17701780 A JP 17701780A JP S6411138 B2 JPS6411138 B2 JP S6411138B2
Authority
JP
Japan
Prior art keywords
insulating layer
electrode
counter electrode
humidity sensor
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17701780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57100714A (en
Inventor
Masahiro Oida
Kenji Nagamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17701780A priority Critical patent/JPS57100714A/ja
Publication of JPS57100714A publication Critical patent/JPS57100714A/ja
Publication of JPS6411138B2 publication Critical patent/JPS6411138B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP17701780A 1980-12-15 1980-12-15 Moisture sensor Granted JPS57100714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17701780A JPS57100714A (en) 1980-12-15 1980-12-15 Moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17701780A JPS57100714A (en) 1980-12-15 1980-12-15 Moisture sensor

Publications (2)

Publication Number Publication Date
JPS57100714A JPS57100714A (en) 1982-06-23
JPS6411138B2 true JPS6411138B2 (enrdf_load_stackoverflow) 1989-02-23

Family

ID=16023697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17701780A Granted JPS57100714A (en) 1980-12-15 1980-12-15 Moisture sensor

Country Status (1)

Country Link
JP (1) JPS57100714A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8610180B2 (en) 2010-06-11 2013-12-17 Semiconductor Energy Laboratory Co., Ltd. Gas sensor and method for manufacturing the gas sensor

Also Published As

Publication number Publication date
JPS57100714A (en) 1982-06-23

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