JPS6410937B2 - - Google Patents

Info

Publication number
JPS6410937B2
JPS6410937B2 JP6956281A JP6956281A JPS6410937B2 JP S6410937 B2 JPS6410937 B2 JP S6410937B2 JP 6956281 A JP6956281 A JP 6956281A JP 6956281 A JP6956281 A JP 6956281A JP S6410937 B2 JPS6410937 B2 JP S6410937B2
Authority
JP
Japan
Prior art keywords
whiskers
film
ion
implanted
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6956281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183054A (en
Inventor
Hiromi Sakurai
Yoichi Akasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6956281A priority Critical patent/JPS57183054A/ja
Priority to DE19823217026 priority patent/DE3217026A1/de
Publication of JPS57183054A publication Critical patent/JPS57183054A/ja
Priority to US06/717,597 priority patent/US4899206A/en
Publication of JPS6410937B2 publication Critical patent/JPS6410937B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6956281A 1981-05-06 1981-05-06 Semiconductor device Granted JPS57183054A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6956281A JPS57183054A (en) 1981-05-06 1981-05-06 Semiconductor device
DE19823217026 DE3217026A1 (de) 1981-05-06 1982-05-06 Halbleitervorrichtung
US06/717,597 US4899206A (en) 1981-05-06 1985-04-01 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6956281A JPS57183054A (en) 1981-05-06 1981-05-06 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57183054A JPS57183054A (en) 1982-11-11
JPS6410937B2 true JPS6410937B2 (enrdf_load_stackoverflow) 1989-02-22

Family

ID=13406316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6956281A Granted JPS57183054A (en) 1981-05-06 1981-05-06 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57183054A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278099A (en) * 1985-05-13 1994-01-11 Kabushiki Kaisha Toshiba Method for manufacturing a semiconductor device having wiring electrodes
JPH07120655B2 (ja) * 1988-10-25 1995-12-20 三菱電機株式会社 半導体装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158649A (en) * 1979-05-30 1980-12-10 Fujitsu Ltd Manufacture of electrode wiring

Also Published As

Publication number Publication date
JPS57183054A (en) 1982-11-11

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