JPS6410062B2 - - Google Patents

Info

Publication number
JPS6410062B2
JPS6410062B2 JP18790880A JP18790880A JPS6410062B2 JP S6410062 B2 JPS6410062 B2 JP S6410062B2 JP 18790880 A JP18790880 A JP 18790880A JP 18790880 A JP18790880 A JP 18790880A JP S6410062 B2 JPS6410062 B2 JP S6410062B2
Authority
JP
Japan
Prior art keywords
thin film
mask
resist
indium oxide
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18790880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57112025A (en
Inventor
Hisao Haruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18790880A priority Critical patent/JPS57112025A/ja
Publication of JPS57112025A publication Critical patent/JPS57112025A/ja
Publication of JPS6410062B2 publication Critical patent/JPS6410062B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/40—Electrostatic discharge [ESD] related features, e.g. antistatic coatings or a conductive metal layer around the periphery of the mask substrate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging
    • G03F1/78—Patterning of masks by imaging by charged particle beam [CPB], e.g. electron beam patterning of masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
JP18790880A 1980-12-29 1980-12-29 Formation of pattern Granted JPS57112025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18790880A JPS57112025A (en) 1980-12-29 1980-12-29 Formation of pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18790880A JPS57112025A (en) 1980-12-29 1980-12-29 Formation of pattern

Publications (2)

Publication Number Publication Date
JPS57112025A JPS57112025A (en) 1982-07-12
JPS6410062B2 true JPS6410062B2 (OSRAM) 1989-02-21

Family

ID=16214303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18790880A Granted JPS57112025A (en) 1980-12-29 1980-12-29 Formation of pattern

Country Status (1)

Country Link
JP (1) JPS57112025A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2189903A (en) * 1986-04-01 1987-11-04 Plessey Co Plc An etch technique for metal mask definition
JPS63166231A (ja) * 1986-12-27 1988-07-09 Hoya Corp フオトマスクの製造方法

Also Published As

Publication number Publication date
JPS57112025A (en) 1982-07-12

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