JPS6398365U - - Google Patents

Info

Publication number
JPS6398365U
JPS6398365U JP19193686U JP19193686U JPS6398365U JP S6398365 U JPS6398365 U JP S6398365U JP 19193686 U JP19193686 U JP 19193686U JP 19193686 U JP19193686 U JP 19193686U JP S6398365 U JPS6398365 U JP S6398365U
Authority
JP
Japan
Prior art keywords
evaporation
breakdown
shutter
ion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19193686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19193686U priority Critical patent/JPS6398365U/ja
Publication of JPS6398365U publication Critical patent/JPS6398365U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19193686U 1986-12-12 1986-12-12 Pending JPS6398365U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19193686U JPS6398365U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19193686U JPS6398365U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Publications (1)

Publication Number Publication Date
JPS6398365U true JPS6398365U (enrdf_load_stackoverflow) 1988-06-25

Family

ID=31146546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19193686U Pending JPS6398365U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPS6398365U (enrdf_load_stackoverflow)

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