JPS6373352U - - Google Patents

Info

Publication number
JPS6373352U
JPS6373352U JP16515286U JP16515286U JPS6373352U JP S6373352 U JPS6373352 U JP S6373352U JP 16515286 U JP16515286 U JP 16515286U JP 16515286 U JP16515286 U JP 16515286U JP S6373352 U JPS6373352 U JP S6373352U
Authority
JP
Japan
Prior art keywords
evaporation
shutter
substrate
cuts
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16515286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16515286U priority Critical patent/JPS6373352U/ja
Publication of JPS6373352U publication Critical patent/JPS6373352U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16515286U 1986-10-27 1986-10-27 Pending JPS6373352U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16515286U JPS6373352U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16515286U JPS6373352U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6373352U true JPS6373352U (enrdf_load_stackoverflow) 1988-05-16

Family

ID=31094922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16515286U Pending JPS6373352U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6373352U (enrdf_load_stackoverflow)

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