JPS63110567U - - Google Patents

Info

Publication number
JPS63110567U
JPS63110567U JP45587U JP45587U JPS63110567U JP S63110567 U JPS63110567 U JP S63110567U JP 45587 U JP45587 U JP 45587U JP 45587 U JP45587 U JP 45587U JP S63110567 U JPS63110567 U JP S63110567U
Authority
JP
Japan
Prior art keywords
shutter
sensor
power supply
set value
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP45587U priority Critical patent/JPS63110567U/ja
Publication of JPS63110567U publication Critical patent/JPS63110567U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP45587U 1987-01-06 1987-01-06 Pending JPS63110567U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP45587U JPS63110567U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45587U JPS63110567U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Publications (1)

Publication Number Publication Date
JPS63110567U true JPS63110567U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30777444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45587U Pending JPS63110567U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Country Status (1)

Country Link
JP (1) JPS63110567U (enrdf_load_stackoverflow)

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