JPS6214737Y2 - - Google Patents
Info
- Publication number
- JPS6214737Y2 JPS6214737Y2 JP18305179U JP18305179U JPS6214737Y2 JP S6214737 Y2 JPS6214737 Y2 JP S6214737Y2 JP 18305179 U JP18305179 U JP 18305179U JP 18305179 U JP18305179 U JP 18305179U JP S6214737 Y2 JPS6214737 Y2 JP S6214737Y2
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- substrate
- vacuum
- holding frame
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 239000013078 crystal Substances 0.000 claims description 24
- 238000007738 vacuum evaporation Methods 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18305179U JPS6214737Y2 (enrdf_load_stackoverflow) | 1979-12-31 | 1979-12-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18305179U JPS6214737Y2 (enrdf_load_stackoverflow) | 1979-12-31 | 1979-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56103047U JPS56103047U (enrdf_load_stackoverflow) | 1981-08-12 |
| JPS6214737Y2 true JPS6214737Y2 (enrdf_load_stackoverflow) | 1987-04-15 |
Family
ID=29693362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18305179U Expired JPS6214737Y2 (enrdf_load_stackoverflow) | 1979-12-31 | 1979-12-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214737Y2 (enrdf_load_stackoverflow) |
-
1979
- 1979-12-31 JP JP18305179U patent/JPS6214737Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56103047U (enrdf_load_stackoverflow) | 1981-08-12 |
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