JPS56103047U - - Google Patents

Info

Publication number
JPS56103047U
JPS56103047U JP18305179U JP18305179U JPS56103047U JP S56103047 U JPS56103047 U JP S56103047U JP 18305179 U JP18305179 U JP 18305179U JP 18305179 U JP18305179 U JP 18305179U JP S56103047 U JPS56103047 U JP S56103047U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18305179U
Other languages
Japanese (ja)
Other versions
JPS6214737Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18305179U priority Critical patent/JPS6214737Y2/ja
Publication of JPS56103047U publication Critical patent/JPS56103047U/ja
Application granted granted Critical
Publication of JPS6214737Y2 publication Critical patent/JPS6214737Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18305179U 1979-12-31 1979-12-31 Expired JPS6214737Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18305179U JPS6214737Y2 (enrdf_load_stackoverflow) 1979-12-31 1979-12-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18305179U JPS6214737Y2 (enrdf_load_stackoverflow) 1979-12-31 1979-12-31

Publications (2)

Publication Number Publication Date
JPS56103047U true JPS56103047U (enrdf_load_stackoverflow) 1981-08-12
JPS6214737Y2 JPS6214737Y2 (enrdf_load_stackoverflow) 1987-04-15

Family

ID=29693362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18305179U Expired JPS6214737Y2 (enrdf_load_stackoverflow) 1979-12-31 1979-12-31

Country Status (1)

Country Link
JP (1) JPS6214737Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6214737Y2 (enrdf_load_stackoverflow) 1987-04-15

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